Hitachi Microscope & Magnifier S-3400N Benutzerhandbuch
6.3 Specification of S-3400N External Communication (Option)
6 - 26
6.3.2.8 Stage
(1) Stage information
Property
(1) Stage information
Property
Chamber type reading
ChamberType
as Long
Read Only
0: Standard specimen chamber
Comment:
Currently there is only standard specimen
chamber, but maybe other type chamber will
add in future.
chamber, but maybe other type chamber will
add in future.
Stage type reading
StageType
as Long
Read Only
0: manual stage
1: 5 axes motor drive stage
(2) Monitoring /setting of stage position
Method
5 axis position monitoring
GetStagePosition (Byref X as Long, Byref Y as Long, Byref Z as Long,
Byref T as Long, Byref R as Long) as Long
X
0 to 100000000
: (nm)
100 nm Step
Y
0 to 50000000
: (nm)
100 nm Step
Z
5000000 to 70000000 : (nm)
100000 nm Step
T
-20000 to 90000
: x1000 (deg) 0.1 deg Step
R
0 to 359900
: x1000 (deg) 0.1 deg Step
Return
0: Normal receiving
Excluding
0: Abnormal receiving
Comment:
Read current position of X, Y, Z, T, R.