Hitachi Microscope & Magnifier S-3400N User Manual

3.5    Operation for Image Observation 

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IMPORTANT:  The BSE uses semiconductor elements in its detection unit.    To prevent 

damage to the semiconductor elements and the specimen, the following 
precautions should be observed: 

 
•  The movable range for the stage must be observed strictly.    In particular, a short WD or a 

high angle tilt can cause the stage or specimen to touch the detector, damaging the sensor. 
See 3.5.6    Operation of the Specimen Stage (Type I - Manual Stage). 

•  The specimen height should be set accurately by using the supplied specimen height gauge. 

•  For the Type II stage, always measure the specimen height using a specimen height level 

gauge and set the specimen height in the Stage tab of the Operation Panel.    If the actual 
specimen height is greater than the set height, the specimen can come into contact with the 
semiconductor sensor even within the software-defined movable range. 
See 3.2.4.2    Measuring and Setting the Specimen Height. 
See 3.5.7.3    Setting Specimen Size and Detectors in Use. 

•  When inserting the specimen stage use the interference verification protective metal fixture 

and check the operating range of the stage axes so that the specimen will not touch the 
fixture; the specimen stage should be used only within that range. 
See 3.5.6.6  Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk 

•  To prevent any contact between a specimen and the detector sensor, the Z (WD) should be 

used in a range greater than 5 mm. 

 

 

 

Fig. 3.5-4    Interference Verification Protective Fixture