Hitachi Microscope & Magnifier S-3400N User Manual

 

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1 

SPECIFICATIONS AND INSTALLATION REQUIREMENTS .........................................1 -  1 
1.1 Specifications ........................................................................................................1 

1.1.1 

Resolution ................................................................................................1 -  1 

1.1.2 

Magnification............................................................................................1 -  1 

1.1.3 

Electron Optical System ...........................................................................1 -    1 

1.1.4 

Specimen Goniometer Stage ...................................................................1 -    2 

1.1.5 

Evacuation System ..................................................................................1 -    2 

1.1.6 

Imaging Function .....................................................................................1 -    2 

1.1.7 

Safety Equipment.....................................................................................1 -    4 

1.1.8 

Size and Weight.......................................................................................1 -    4 

1.2  Installation Requirements ......................................................................................1 -    5 

1.2.1 

General ....................................................................................................1 -  5 

1.2.2 

Room Temperature, Humidity and Altitude...............................................1 -    5 

1.2.3 

Line Power Requirement..........................................................................1 -    5 

1.2.4 

Grounding Terminal .................................................................................1 -    6 

1.2.5 

Stray Magnetic Field ................................................................................1 -    7 

1.2.6 

Vibrations .................................................................................................1 - 10 

1.2.7 

Power Line Noise and Electric Field Noise ...............................................1 - 11 

1.2.8 

Disturbance by Sound Waves ..................................................................1 - 13 

1.2.9 

Electro-Magnetic Compatibilitiy ................................................................1 - 13 

1.2.10  Site Requirements ...................................................................................1 - 13 

1.3  Customer-supplied Items .......................................................................................1 - 15 

 
2 FUNCTIONS...................................................................................................................2 -  1 

2.1  Control Knobs and Switches on Main Unit .............................................................2 -    2 

2.1.1 

Main Unit..................................................................................................2 -    2 

2.1.2 

Electron Optical Column ..........................................................................2 -    3 

2.1.3 

Specimen Stage (Type I) .........................................................................2 -    4 

2.1.4 

Specimen Stage (Type II) ........................................................................2 -    5 

2.1.5 

EVAC Panel .............................................................................................2 -    6 

2.1.6 

Evacuation System ..................................................................................2 -    7 

2.1.7 

System Power Distribution Board.............................................................2 -    8 

2.2  Control Knobs and Switches on Display Unit .........................................................2 -    9 

2.2.1 

Display Console .......................................................................................2 -    9 

2.2.2 

PC (Personal Computer) ..........................................................................2 - 10 

2.2.3 

Manual Operation Panel...........................................................................2 - 11 

2.2.4 

Mouse and Trackball................................................................................2 - 12 

2.3  Graphical User Interface (GUI) ..............................................................................2 - 13 

2.3.1 

Starting the PC and Logging in the S-3400 Program ...............................2 - 13 

2.3.2 

S-3400N SEM Main Window ....................................................................2 - 15 

2.3.3 

Control Arrangement on the Window .......................................................2 - 17 

2.3.4 

Menus ......................................................................................................2 - 18 

2.3.5 

Popup Menu.............................................................................................2 - 24 

2.3.6 

Control Panel ...........................................................................................2 - 26 
2.3.6.1 

Functional Windows on the Control Panel................................2 - 26