ETA Systems SM5505 Benutzerhandbuch

Conditioned Power Center

Section 7 - Options

7.7 SEMI S2-0200 Certification

For use in semiconductor fabrication applications, the manufacturer offers a version of the power conditioner that

incorporates special modifications of the basic product family that are required for the power conditioner to meet

the safety requirements of the Semiconductor Equipment and Materials International (SEMI) safety standard S2-

0200. Included in the additional requirements for SEMI S2-0200 certification are provisions for special labeling,

an approved EMO (emergency machine off) circuit, input power conductor restraints (for additional safety in seis-

mically active locations), and product documentation that meets or exceeds the criteria specified in SEMI S2-

0200. Compliant documentation and labeling are provided with every product. Choosing the SEMI S2-0200

option adds the following additional features:

7.7.1 Input Power Conductor Restraints

SEMI S2-0200 guidelines recognize that the power conditioner, when used in semiconductor operations, may

be installed in geographic areas that experience frequent (sometimes violent) seismic activity. The seismic an-

chorage option described in paragraph 7.6 is designed to limit horizontal and vertical movement of the power

conditioner, and since the product may be installed in seismically active locations for non-semiconductor applica-

tions, the anchorage kit is provided as a separate option. For full compliance with SEMI S2-0200, however,

SEMI requires that the input power conductors also be provided with a restraint system to prevent their detach-

ment from the input circuit breaker up to the limits of movement provided by the anchorage kits. When ordered

with the SEMI S2-0200 certification option, the power conditioner will be fitted with a steel bracket installed inside

the power conditioner enclosure running horizontally from side to side and near the top of the enclosure. At-

tached to this steel bracket is a plastic bag containing additional hardware for clamping the input power conduc-

tors to the steel restraint bracket. Once the input power conductors have been attached to the input circuit

breaker, the clamping hardware should be installed.

Take care not to severely over-tighten the clamping hardware to the extent that
the input power conductors are greatly distorted or the conductor insulation is
damaged in any way. Doing so may lead to conductor failure or short circuit,

which is not covered by the product warranty.

7.7.2 SEMI S2-0200 Compliant EMO

The EMO (emergency machine off) circuit provided with the SEMI S2-0200 option is considerably different from

the standard EMO design due to the incorporation of additional components designed to increase personnel

safety. For a complete details on the design of the SEMI-S2-0200 EMO circuit, please consult the schematics

on pages 34 (general system schematic), 35 (standard EMO circuit, and 36 (SEMI S2-0200 EMO) found in this

product manual. The standard EMO circuit operates as a normally open (N.O.) circuit that, when