Canon FPA-5550iZ Stepper Техническое Руководство
Model Type
i-Line (365nm) Stepper
Wafer Size
300mm; 200mm
Resolution
≤0.35µm *Conventional
≤0.28µm *Annular
Numerical Aperture (NA)
0.45 ~ 0.57
Reticle Size
6in. (0.25in. thick)
Reduction Ratio
4:1
Field Size
26mm x 33mm
Overlay Accuracy
≤18nm (|m|+3 )
FPA-5550iZ Stepper
Product Specifications
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Main Unit Spec