Hitachi S-3400N Benutzerhandbuch
6.3 Specification of S-3400N External Communication (Option)
6 - 12
Table 6.3-2 Method Command
Command Set
value
Return
Contents
SemCommInitialize
0 : Normal end
1 : Abnormal end
1 : Abnormal end
Initialize the
communication
communication
SetHVOn
0 : HV-OFF
1 : HV-ON
1 : HV-ON
0: Normal
receiving
Excluding 0:
Abnormal
receiving
receiving
Excluding 0:
Abnormal
receiving
HV ON/OFF setting
SetVacc 300-30000
：0.3-
30.0 kV
0: Normal
receiving
Excluding 0:
Abnormal
receiving
receiving
Excluding 0:
Abnormal
receiving
Acceleration
voltage
setting
voltage
setting
SetMag 5-300000
：x5-x300k 0 : Normal end
2 : Abnormal end
Magnification.
setting
setting
SetWD 400-7000
：4.00-
70.00 mm
0 : Normal end
2 : Abnormal end
2 : Abnormal end
W.D. setting
SetObjLens Coarse
：０-16383
Fine
：0-4095
0 : Normal end
2 : Abnormal end
2 : Abnormal end
Focus value setting
SetProbeCurrent 0-1000
：0.0-100.0
0 : Normal end
2 : Abnormal end
2 : Abnormal end
Probe current
setting
setting
SetABC 0:
Normal
receiving
Excluding 0:
Abnormal
receiving
Excluding 0:
Abnormal
receiving
ABCC execute
SetAFC 0:
Normal
receiving
Excluding 0:
Abnormal
receiving
Excluding 0:
Abnormal
receiving
AFC execute
GetStagePosition
0:
Normal
receiving
Excluding 0:
Abnormal
receiving
Excluding 0:
Abnormal
receiving
5 axis position
monitoring
monitoring