Benutzerhandbuch für Hitachi S-4800

Inhaltsverzeichnis

• INSTRUCTION MANUAL FOR MODEL S-4800 FIELD EMISSION SCANNING ELECTRON MICROSCOPE

  1
• FOREWORD

  3
  • Scope of Instruction Manual

    4
• GUARANTEE

  5
• INSTALLATION AND AFTER-SALES SERVICE

  7
• CAUTION ON DISPOSAL OF INSTRUMENT

  7
  • Available Training Programs

    8
  • Handling of Chemicals

    8
  • Instruction Manual

    8
• SAFETY SUMMARY

  9
  • General Safety Guidelines

    9
    • Electrical Hazard

      11
    • High Temperature Hazard

      12
    • Magnetic Field Hazard

      12
    • Laser light Hazard

      13
    • Warning labels on the Main unit (standard version)

      14
    • Warning labels on the Display unit (standard version)

      15
    • Warning labels on the Main unit (ANSI style labels)

      16
    • Warning labels on the Display unit (ANSI style labels)

      17
  • WARNING

    18
    • Other Relevant Precautions

      20
    • Emergency Off Button

      23
    • Main Power Disconnect

      24
    • Power Supply and Grounding Connection

      24
  • INTERLOCK

    25
    • Location of safety interlock

      26
    • Protection from movement during earthquakes (Display unit)

      27
    • Protection from movement during earthquakes (Main unit)

      28
    • Gravity location of Main unit (Type1)

      29
    • Gravity location of Main unit (Type2)

      30
    • Gravity location of Display unit

      31
    • An example of the water-leakage detector

      32
• PRECAUTIONS ON HANDLING

  33
  • 1. PRECAUTIONS FOR TRANSPORT

    33
  • 2. PRECAUTIONS FOR POWER CONNECTION

    33
  • 3. GENERAL PRECAUTIONS

    35
  • 4. MEASURES FOR EMERGENCY

    35
  • 5. CAUTIONS ON OPERATION

    36
  • 6. OTHERS

    36
  • 7. FLASHING

    37
• SPECIFICATION

  40
• INSTALLATION CONDITIONS

  43
• Table of Contents

  46
• 1. INSTALLATION

  52
  • 1.1 Installation Requirements

    52
    • 1.1.1 General

      52
    • 1.1.2 Room Temperature and Humidity

      52
    • 1.1.3 Line Power Requirement

      53
    • 1.1.4 Grounding

      53
    • 1.1.5 Water Supply and Drain

      53
    • 1.1.6 Stray Magnetic Field

      54
    • 1.1.7 Floor Vibration

      55
    • 1.1.8 Power Line Noise and Electric Field Noise

      57
    • 1.1.9 Disturbance by Sound Waves

      58
    • 1.1.10 Site requirements

      58
  • 1.2 Materials or Instruments to be prepared by User

    60
  • 1.3 Wiring

    60
    • 1.3.1 Power and Ground Wirings

      61
• 2. FUNCTIONS

  63
  • 2.1 Control Knobs and Switches on Main Unit

    64
    • 2.1.1 Main unit (Column)

      64
  • 2.2 Control Knobs and Switches on Display Unit

    75
    • 2.2.1 Display

      75
  • 2.3 Graphical User Interface (GUI)

    78
    • 2.3.1 Starting the PC and logging in the S-4800 program

      78
    • 2.3.2 S-4800 SEM Main Window

      80
    • 2.3.3 Control arrangement on the window

      81
    • 2.3.4 Menu

      83
    • 2.3.5 Control Panel

      88
      • 2.3.5.1 Functional blocks on the Control Panel

        88
      • 2.3.5.2 HV control block

        88
      • 2.3.5.3 Scan control block

        90
      • 2.3.5.4 Auto control

        90
      • 2.3.5.5 Monitoring function

        91
      • 2.3.5.6 Magnification control

        91
      • 2.3.5.7 Image recording

        92
      • 2.3.5.8 Stage, Image shift control

        93
      • 2.3.5.9 Extension for Dual screen mode

        94
    • 2.3.6 Operation Panel

      95
      • 2.3.6.1 SIGNAL SELECT block

        96
      • 2.3.6.2 OPE CONDITION block

        97
      • 2.3.6.3 R.ROTATION block

        98
      • 2.3.6.4 SCAN MODE block

        98
      • 2.3.6.5 SCAN SIZE block

        99
      • 2.3.6.6 DATA ENTRY block

        99
      • 2.3.6.7 SIGNAL PROCESSING block

        100
      • 2.3.6.8 TILT COMPENSATION block

        101
      • 2.3.6.9 COLOR MIXING block

        101
      • 2.3.6.10 Scroll bar and area marker block

        102
      • 2.3.6.11 Scroll bar and area marker block

        102
      • 2.3.6.12 Other optional function block

        102
      • 2.3.6.13 Arrangement of control blocks

        103
    • 2.3.7 Mouse operation on the scanning image

      104
      • 2.3.7.1. Exchanging mouse control functions

        104
      • 2.3.7.2 Focus/stigma/contrast/brightness adjustment

        104
      • 2.3.7.3 Stage and image shift tools

        106
    • 2.3.8 Setup dialog window

      106
      • 2.3.8.1 Column tab

        107
      • 2.3.8.2 Image tab

        109
      • 2.3.8.3 Record tab

        110
      • 2.3.8.4 OP. Cond tab

        112
    • 2.3.9 Captured Image Window

      113
    • 2.3.10 SEM Data Manager Window

      114
    • 2.3.11 Alignment Dialog Window

      114
    • 2.3.12 CD Measurement dialog window (option)

      115
    • 2.3.13 Comm Port Setting Dialog Window

      115
    • 2.3.14 Login Setting Dialog Window

      115
    • 2.3.15 Oblique Dialog Window

      116
    • 2.3.16 Password Setting Dialog Window

      116
    • 2.3.17 Save Image Dialog Window

      117
    • 2.3.18 Opt Signal Processing Dialog Window

      117
    • 2.3.19 Split/Dual Mag Controller

      117
    • 2.3.20 Using Short-Cut Keys

      118
• 3. OPERATION

  119
  • 3.1 Preliminary Operation

    121
    • 3.1.1 Check of Column Vacuum

      121
    • 3.1.2 Flow the cooling water

      122
    • 3.1.3 Starting the Display

      123
    • 3.1.4 Use of Anti-Contamination Trap

      124
  • 3.2 Specimen Setting and Specimen Exchange

    125
    • 3.2.1 Cautions on Specimen Preparation

      125
    • 3.2.2 Specimen Preparation for Materials

      125
    • 3.2.3 Adjustment of Specimen Height

      126
    • 3.2.4 Specimen Exchange Position

      126
    • 3.2.5 How to Set Specimen

      127
      • 3.2.5.1 Extracting specimen from stage

        127
      • 3.2.5.2 Opening the specimen exchange chamber door

        129
      • 3.2.5.3 Setting a specimen

        129
  • 3.3 Application of High Voltage

    130
    • 3.3.1 Condition where the gun high voltage is applicable

      130
    • 3.3.2 Flashing

      130
      • 3.3.2.1 About flashing

        130
      • 3.3.2.2 Flashing Procedure

        130
    • 3.3.3 Setting of Accelerating Voltage and Emission Current

      131
    • 3.3.4 Application of High Voltage

      132
  • 3.4 Optimizing the Electron Beam

    133
    • 3.4.1 Selecting a Magnification Mode

      133
    • 3.4.2 Selecting Electron Optical Column Condition

      133
      • 3.4.2.1 High Mag mode

        133
      • 3.4.2.2 Low Mag Mode

        137
    • 3.4.3 Column Alignment Operation

      138
  • 3.5 Operation for Image Observation

    142
    • 3.5.1 SE detector

      142
      • 3.5.1.1 Secondary and backscattered signals and their Characteristics

        143
      • 3.5.1.2 Signal Control

        144
    • 3.5.2 Selecting Magnification

      146
    • 3.5.3 Selecting Scanning Speed

      147
    • 3.5.4 Image Brightness and Contrast Adjustment

      149
    • 3.5.5 Focus and Astigmatism Correction

      152
    • 3.5.6 Operation of the Specimen Stage (Type I - Manual Stage)

      155
      • 3.5.6.1 Movable range and specimen exchange position

        155
      • 3.5.6.2 Movable range limitation of X, Y and R axes

        155
      • 3.5.6.3 Tilt and Z axes limitation

        156
      • 3.5.6.4 3 axes motorized stage (Type1 stage option)

        157
      • 3.5.6.5 Stage Locking

        158
    • 3.5.7 Operation of the Specimen Stage (Type 2 - 5-Axis Motorized Stage)

      159
      • 3.5.7.1 Coordinate notation

        159
      • 3.5.7.2 Movable range and specimen exchange position

        160
      • 3.5.7.3 Setting specimen size and detectors in use

        161
      • 3.5.7.4 Valious operation for specimen stage

        162
      • 3.5.7.5 Stage tab

        163
      • 3.5.7.6 X, Y, R axes operation

        164
      • 3.5.7.7 Z and Tilt axes operation

        165
      • 3.5.7.8 Stage mouse operation on the scanning image

        167
      • 3.5.7.9 Position memory function

        173
      • 3.5.7.10 Stage History function

        174
      • 3.5.7.11 Image Navigation

        175
      • 3.5.7.12 Rotation Assist function

        177
      • 3.5.7.13 Rotation / tilt eucentric function and calibration

        179
      • 3.5.7.14 Stage lock

        184
      • 3.5.7.15 Stopping stage and Returning to previous stage position

        185
      • 3.5.7.16 Moveable range and limitation by optional detectors

        186
  • 3.6 Saving and Recording Images

    189
    • 3.6.1 Saving and Recording Images

      189
    • 3.6.2 Preparing Images for Recording

      190
    • 3.6.3 Setting Conditions for Image Capturing

      191
    • 3.6.4 Image Capturing

      192
    • 3.6.5 Saving a Scanning Image (Direct Save)

      193
    • 3.6.6 Saving Captured Images

      194
    • 3.6.7 Taking Photographs (Option)

      194
  • 3.7 Using SEM Data Manager

    197
  • 3.8 At the End of Daily Use

    198
    • 3.8.1 Turning High Voltage Off

      198
    • 3.8.2 Setting the Stage at the Specimen Exchange Position

      198
    • 3.8.3. Taking Out a Specimen

      198
    • 3.8.4 Closing Windows and Shutting the Display Power

      200
  • 3.9 Using Other Functions

    201
    • 3.9.1 Screen Mode

      201
    • 3.9.2 Split Screen and Dual Mag Mode

      203
    • 3.9.3 Signal Selection and Color Mixing

      204
    • 3.9.4 X-ray Analysis Mode

      206
    • 3.9.5 Signal Processing

      208
    • 3.9.6 Operating Condition Memory

      210
    • 3.9.7 Pseudo Color Display

      212
    • 3.9.8 Data Entry Function

      212
    • 3.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation

      215
    • 3.9.11 Printing images using Report generation function

      217
    • 3.9.12 Copy Image

      219
    • 3.9.13 Copy Image information text

      219
    • 3.9.14 Oblique Image

      220
    • 3.9.15 Optional setting

      221
    • 3.9.16 Password Setting

      223
    • 3.9.17 Setting Login Name

      223
  • 3.10 Image Quality

    225
    • 3.10.1 Accelerating Voltage and Image Quality

      225
    • 3.10.2 Condenser Lens Setting and Image Quality

      226
    • 3.10.3 Objective Lens Aperture Size and Image Quality

      226
  • 3.11 Mechanical Column Alignment

    227
    • 3.11.1 Preparative Operation for Alignment

      227
    • 3.11.2 Mechanical Alignment of the Electron Gun

      228
    • 3.11.3 Alignment of the Beam Monitor Aperture

      228
    • 3.11.4 Alignment of the Objective Lens Aperture

      229
    • 3.11.5 Mechanical Alignment of the First Condenser Lens

      229
    • 3.11.6 Mechanical Alignment of the Second Condenser Lens

      229
    • 3.11.7 Stigma Alignment (electro-magnetic alignment)

      230
    • 3.11.8 Aperture Alignment (electro-magnetic alignment)

      230
  • 3.12 Using SEM Data Manager

    232
    • 3.12.1 Precaution About SEM Data Manager

      232
    • 3.12.2 Functions

      233
      • 3.12.2.1 Image Database

        233
      • 3.12.2.2 Menu and tool buttons

        234
    • 3.12.3 Operation

      237
      • 3.12.3.1 Registering Images on SEM Data Manager Database

        237
      • 3.12.3.2 Selecting User name and opening data tree

        238
      • 3.12.3.3 Image display

        239
      • 3.12.3.4 Image information

        240
      • 3.12.3.5 Viewer display

        240
      • 3.12.3.6 Data Entry

        240
      • 3.12.3.7 Contrast Conversion

        243
      • 3.12.3.8 Image Processing

        246
      • 3.12.3.9 Color Mixing

        247
      • 3.12.3.10 Printing images

        249
      • 3.12.3.11 Image file operation

        249
      • 3.12.3.12 Batch operation of image files

        250
      • 3.12.3.13 Slide show

        252
      • 3.12.3.14 Optimizing and repairing database file

        252
• 4. MAINTENANCE

  253
  • 4.1 Maintenance of Electron optical Column

    253
    • 4.1.1 Maintaining Vacuum of Electron Gun and Intermediate Chamber

      253
    • 4.1.2 Replacement and Cleaning of Objective Lens Aperture

      253
    • 4.1.3 Cleaning of Aperture Plates

      255
  • 4.2 Maintenance of Rotary Pump （Only for P/N 539-9010 and 539-9060）

    257
    • 4.2.1 Oil Change

      257
    • 4.2.2 Replacement of Oil Mist Trap

      258
    • 4.2.3 Troubleshooting

      259
  • 4.3 Maintenance of Air Compressor（Only for P/N 539-9010 and 539-9060）

    260
    • 4.3.1 Checkup and Maintenance

      260
    • 4.3.2 Troubleshooting of Air Compressor

      262
    • 4.3.3 Location and Functions of Major Components

      263
  • 4.4 Troubleshooting

    264
    • 4.4.1 When Column Evacuation does not Work

      264
    • 4.4.2 When Specimen Exchange Chamber Vacuum is not Good

      264
    • 4.4.3 When Specimen Chamber Vacuum is not Good

      265
    • 4.4.4 When Ion Pump Vacuum Degraded

      265
    • 4.4.5 When Emission Current is not Set at Normal Value

      266
    • 4.4.6 When Image is not Shown on Screen

      266
    • 4.4.7 When Image is Very Noisy

      267
    • 4.4.8 When You cannot Correct Astigmatism

      268
    • 4.4.9 When Auto Focus or Auto Stigma does not Work Satisfactorily

      268
    • 4.4.10 When S-4800 control program does not start up

      269
    • 4.4.11 When PC has Hanged up

      269
    • 4.4.12 When Error Messages are shown

      270
  • 4.5 Operation for shutting down all power supply of S-4800

    270
  • 4.6 Operation when power was shut down by power line failure

    270
  • 4.7 Operation for Starting S-4800

    271
  • 4.8 Operation when power line failure recovered

    272
  • 4.9 Operation when Water supply stopped by failure

    272
  • 4.10 Gun Baking operation

    273
  • 4.11 Caution on Maintenance

    277
• 5. REPLACEMENT PARTS

  278
  • 5.1 Consumables and Spare Parts

    278
    • 5.1.1 Consumables

      278
    • 5.1.2 Replacement Parts

      279
    • 5.1.3 Spare Parts

      280
• 6. ACCESSORY OPERATION

  281
  • 6.1 Model S-5080 Auto-Camera (option)

    281
    • 6.1.1 Configuration

      281
    • 6.1.2 Specifications

      283
    • 6.1.3 Assembling the Camera

      285
    • 6.1.4 Operation

      286
  • 6.2 Installation Manual for the SEC Guide Rail (for Installer)

    287
• INDEX

  288