BenutzerhandbuchInhaltsverzeichnis1. UNPACKING THE FMA 1400/1500 MASS FLOW METER11.1 Inspect Package for External Damage11.2 Unpack the Mass Flow Meter/Controller11.3 Returning Merchandise for Repair12. INSTALLATION12.1 Primary Gas Connections12.2 Electrical Connections23. PRINCIPLE OF OPERATION44. SPECIFICATIONS5and above 10 L/min5and above 10 L/min64.3 CE Compliance75. OPERATING INSTRUCTIONS95.1 Preparation and Warm Up95.2 Flow Signal Output Readings105.3 Swamping Condition105.4 Set Point Reference Signal (FMA 1400)105.5 TTL, Valve OFF Control (FMA 1400)115.6 Valve Test/Purge (FMA 1400)116. MAINTENANCE126.1 Introduction126.2 Flow Path Cleaning126.2.1 Restrictor Flow Element (RFE)126.2.2 FMA 1400/1500 Ranges up to 10 L/min136.2.3 FMA 1400/1500 Ranges above 10 L/min136.2.4 Valve Maintenance (FMA 1400)137. CALIBRATION PROCEDURES147.2 Calibration of FMA 1500 Mass Flow Meters157.2.1 Connections and Initial Warm Up157.2.2 ZERO Adjustment167.2.3 SPAN Adjustment167.3 Linearity Adjustment167.3.1 Connections and Initial Warm Up167.3.2 ZERO Adjustment177.3.3 25% Flow Adjustment177.3.4 50% Flow Adjustment177.3.5 75% Flow Adjustment177.3.6 100% Flow Adjustment177.4 Calibration of FMA 1400 Mass Flow Controllers177.4.1 Disable Solenoid Valve177.4.2 Valve Adjustment187.4.3 Full Scale Flow Adjustment187.4.4 25% Flow Adjustment187.4.5 50% Flow Adjustment187.4.6 75% Flow Adjustment187.4.7 100% Flow Adjustment188. TROUBLESHOOTING198.1 Common Conditions198.2 Troubleshooting Guide208.3 Technical Assistance229. CALIBRATION CONVERSIONS FROM REFERENCE GASES22APPENDIX 1 COMPONENT DIAGRAMS23APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)24APPENDIX 3 DIMENSIONAL DRAWINGS28APPENDIX 4 WARRANTY32Größe: 828 KBSeiten: 40Language: EnglishHandbuch öffnen