Benutzerhandbuch für Sigma SQC-122c

Inhaltsverzeichnis

• Introduction

  1
• Thin Film Process Overview

  1
• System Connections

  1
• Front Panel

  1
• Rear Panel

  1
• Installation

  1
• Process Setup

  1
• Depositing a Film

  1
• Introduction

  2
• Definitions

  2
• Defining a Film

  2
• Defining a Process

  2
• Sensor Setup

  2
• Source Setup

  2
• Running a Process

  2
• Loop Tuning

  2
• Troubleshooting

  2
• Introduction

  3
• Main Menu

  3
• Next Menus

  3
• Quick Setup Menu

  3
• Process Menus

  3
• Film Menus

  3
• System Parameters Menu

  3
• I/O Setup.

  3
• 4.0 Introduction

  4
• 4.1 Options Cards

  4
• 4.2 Full Rack Extender Installation

  4