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ZSP
User Manual
Fuji Labs ZSP User Manual
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CONTENTS
INTRODUCTION ................................................................................................................................................... i
CAUTION ON SAFETY ....................................................................................................................................... ii
1.
OUTLINE ....................................................................................................................................................... 1
2.
SPECIFICATIONS ........................................................................................................................................ 1
3.
COMPOSITION ............................................................................................................................................. 1
4.
INSTALLATION ........................................................................................................................................... 2
4.1
Selection of installation site ................................................................................................................ 2
4.2
Selection of gas sampling location ...................................................................................................... 2
4.3
Installation work .................................................................................................................................. 3
4.4
Connection of cables ........................................................................................................................... 3
4.5
Connection of pipes ............................................................................................................................. 3
5.
DESCRIPTION OF EACH PART ................................................................................................................. 5
6.
PREPARATION FOR OPERATION ............................................................................................................ 5
6.1
Injection of clean water ....................................................................................................................... 5
6.2
Supply of external power .................................................................................................................... 5
6.3
Check of sample piping, exhaust piping, etc. ...................................................................................... 5
6.4
Airtightness test ................................................................................................................................... 6
6.5
Setting of temperature inside locker .................................................................................................... 6
6.6
Warm-up time ..................................................................................................................................... 6
7.
INDICATION/OPERATION PANEL ........................................................................................................... 7
7.1
Name and description of each component of indication/operation panel ........................................... 7
7.2
Function and indication of indication/operation panel ........................................................................ 8
7.3
General operation of indication/operation panel ................................................................................. 9
8.
CALIBRATION ........................................................................................................................................... 10
8.1
Kinds of standard gas ........................................................................................................................ 10
8.2
Preparation of standard gas ............................................................................................................... 10
8.3
Calibration concentration setting (except zirconia O
2
sensor) .......................................................... 12
8.4
Calibration concentration setting (zirconia O
2
sensor) ..................................................................... 14
8.5
Zero calibration (air point calibration in case of zirconia O
2
sensor) ............................................... 16
8.6
Span calibration (low concentration point calibration in case of zirconia O
2
sensor) ...................... 17
8.7
Auto calibration ................................................................................................................................. 18
9.
OPERATION ............................................................................................................................................... 25
9.1
Operating procedure .......................................................................................................................... 25
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