Canon FPA-5510iV Stepper Specification Guide
Model Type
FPA-5510iV
Wafer Size
300mm, 200mm
Resolution
≤1.50µm
Numerical Aperture (NA)
0.10-0.18
Reticle Size
6in. (0.25in. thick)
Reduction Ratio
2:1
Field Size
52mm x 34mm
Overlay Accuracy
≤300nm (|m|+3 ) frontside
≤300nm (|m|+3 ) backside (option)
FPA-5510iV Stepper
Product Specifications
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Main Unit Spec