Omega fma 1400 User Manual
FLOW RANGES
TABLE I FMA 1500/1400 FOR RANGES UP TO 10 L/MIN
LOW FLOW MASS FLOW METER/CONTROLLERS*
TABLE II FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN
MEDIUM FLOW MASS FLOW METER/CONTROLLERS*
TABLE III FMA 1500/1400 FOR RANGES ABOVE 10 L/MIN
HIGH FLOW MASS FLOW METER/CONTROLLERS*
*Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
8
CODE
scc/min [N
2
]
CODE
std liters/min [N
2
]
02
0 to 10
14
0 to 1
04
0 to 20
16
0 to 2
06
0 to 50
18
0 to 5
08
0 to 100
20
0 to 10
10
0 to 200
12
0 to 500
CODE
standard liters/min [N
2
]
40
60
41
80
42
100
CODE
standard liters/min [N
2
]
23
15
24
20
26
30
27
40
28
50