Omega fma 1400 User Manual

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TABLE VI FMA 1400 SOLENOID VALVE ORIFICE SELECTION TABLE
8.
TROUBLESHOOTING
8.1
Common Conditions
Your Mass Flow Meter/Controller was thoroughly checked at numerous quality
control points during and after manufacturing and assembly operations. It was cal-
ibrated in accordance to your desired flow and pressure conditions for a given gas
or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that
the instrument is not functioning properly please check for the following common
conditions first:
Are all cables connected correctly?
Are there any leaks in the installation?
Is the power supply correctly selected according to requirements? 
When several meters are used a power supply with appropriate 
current rating should be selected.
Were the connector pinouts matched properly? 
When interchanging with other manufacturers' equipment, cables 
and connectors must be carefully wired for correct pin configurations.
Is the pressure differential across the instrument sufficient?
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ORIFICE PART NUMBER
FLOW RATE [N2]
OR.010
under 10 sccm
OR.020
10 to 1000 sccm
OR.040
1 to 5 slpm
OR.055
5 to 10 slpm
OR.063
10 to 15 slpm
OR.073
15 to 20 slpm
OR.094
20 to 50 slpm
OR.125
50 to 100 slpm