Omega fma 1400 User Manual

7.3 Linearity Adjustment......................................................................

7.3.1 Connections and Initial Warm Up...........................................
7.3.2 ZERO Adjustment.................................................................
7.3.3 25% Flow Adjustment.............................................................
7.3.4 50% Flow Adjustment............................................................
7.3.5 75% Flow Adjustment.............................................................
7.3.6 100% Flow Adjustment.......................................................

7.4 Calibration of FMA 1400 Mass Flow Controllers............................

7.4.1 Disable Solenoid Valve.........................................................
7.4.2 Valve Adjustment..................................................................
7.4.3 Full Scale Flow Adjustment...................................................
7.4.4 25% Flow Adjustment...........................................................
7.4.5 50% Flow Adjustment...........................................................
7.4.6 75% Flow Adjustment.........................................................
7.4.7 100% Flow Adjustment..........................................................

8.1 Common Conditions......................................................................
8.2 Troubleshooting Guide...................................................................
8.3 Technical Assistance...................................................................

APPENDIX 1 COMPONENT DIAGRAMS..................................................

APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)...................................

APPENDIX 3 DIMENSIONAL DRAWINGS................................................

APPENDIX 4 WARRANTY.........................................................................

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