User ManualTable of ContentsFOREWORD3Scope of Instruction Manual4Acronyms4GUARANTEE5INSTALLATION AND AFTER-SALES SERVICE7CAUTION ON DISPOSAL OF INSTRUMENT7Available Training Programs8Handling of Chemicals8Instruction Manual8SAFETY SUMMARY9For Safe Handling9General Precautions on Safety10Before Using the System10Precautions on Using the System11Precautions in Installation, Maintenance, and Relocations11Warning Indicators12Caution Indicators14System Warning Labels16Precautions for Proper Operation20About Electricity20Handling Volatile Solvents20Third Party’s Industrial or Proprietary Rights21Laser Light Hazard21Harmful Chemicals21Backup of Important Data22About Computer Applications Software22Protection against Computer Viruses22About Changes in Computer Settings23OS Operation during S-3400N SEM Operation25USB Devices25Network Connection26Using Other Windows Applications27Personal Computer (PC)27Transportation and Relocation of Instrument28Ambient Temperature and Humidity28Additional Information of PC Setting291. Outline292. Setting of Security Center292.1 Firewall292.2 Automatic Updates312.3 Virus Protection323. Other setting333.1 Login User Name333.2 Setting of Display Properties333.3 Setting of Hard disk drive343.4 Setting of Taskbar353.5 Setting of BIOS35Table of Contents361. SPECIFICATIONS AND INSTALLATION REQUIREMENTS451.1 Specifications451.1.1 Resolution451.1.2 Magnification451.1.3 Electron Optical System451.1.4 Specimen Goniometer Stage461.1.5 Evacuation System461.1.6 Imaging Function461.1.7 Safety Equipment481.1.8 Size and Weight481.2 Installation Requirements491.2.1 General491.2.2 Room Temperature, Humidity and Altitude491.2.3 Line Power Requirement491.2.4 Grounding Terminal501.2.5 Stray Magnetic Field511.2.6 Vibrations541.2.7 Power Line Noise and Electric Field Noise551.2.8 Disturbance by Sound Waves571.2.9 Electro-Magnetic Compatibility571.2.10 Site Requirements571.3 Customer-supplied Items592. FUNCTIONS602.1 Control Knobs and Switches on Main Unit612.1.1 Main Unit612.1.2 Electron Optical Column622.1.3 Specimen Stage (Type I)632.1.4 Specimen Stage (Type II)642.1.5 EVAC Panel652.1.6 Evacuation System662.1.7 System Power Distribution Board672.2 Control Knobs and Switches on Display Unit682.2.1 Display Console682.2.2 PC (Personal Computer)692.2.3 Manual Operation Panel702.2.4 Mouse and Trackball712.3 Graphical User Interface (GUI)722.3.1 Starting the PC and Logging in the S-3400 Program722.3.2 S-3400N SEM Main Window742.3.3 Control Arrangement on the Window762.3.4 Menus772.3.5 Popup Menu832.3.6 Control Panel852.3.6.1 Functional Windows on the Control Panel852.3.6.2 Electron Gun Control Unit852.3.6.3 Scan Control Windows862.3.6.4 Auto Control872.3.6.5 Magnification Control892.3.6.6 Capture Control902.3.6.7 Image Recording Control922.3.6.8 EVAC/AIR Control942.3.6.9 Stage Control952.3.6.10 Extension for Dual Screen Mode962.3.7 Operation Panel972.3.7.1 ELECTRON BEAM Window982.3.7.2 Focusing Position (WD) WORKING DISTANCE Window992.3.7.3 VACUUM MODE Window1002.3.7.4 SCAN MODE Window1012.3.7.5 CONDITION LOAD/SAVE Window1022.3.7.6 SCREEN MODE Window1022.3.7.7 DETECTOR Window1032.3.7.8 IMAGE SHIFT Window1032.3.7.9 R.ROTATION Window1042.3.7.10 SIGNAL PROCESSING Window1052.3.7.11 DATA ENTRY Window1062.3.7.12 TILT COMPENSATION Window1062.3.7.13 Other1072.3.8 Mouse Operation on the Scanning Image1082.3.8.1 Exchanging Mouse Control Functions1082.3.8.2 Focus/Stigma/Contrast/Brightness Adjustment1082.3.8.3 Stage and Image Shift Tools1102.3.9 Setup Dialog Window1112.3.9.1 Optics Tab1122.3.9.2 Image Tab1142.3.9.3 Record Tab1152.3.9.4 OP. Cond Tab1172.3.10 Captured Image Window1182.3.11 SEM Data Manager Window1202.3.12 Alignment Dialog Window1202.3.13 CD Measurement Dialog Window (option)1212.3.14 Login Setting Dialog Window1212.3.15 Oblique Dialog Window1222.3.16 Password Setting Dialog Window1222.3.17 Save Image Dialog Window1232.3.18 Opt Signal Processing Dialog Window1232.3.19 Split/Dual Mag Controller1242.3.20 Using Short-cut Keys1243. OPERATION1253.1 Starting the System1263.1.1 Start-up Confirmation Items1263.1.2 Startup Operation1263.2 Mounting a Specimen1283.2.1 Precautions Concerning Specimen Preparation1283.2.2 Specimen Preparation according to Material1283.2.3 Mounting a Specimen on the Type I Stage (Manual Stage)1293.2.3.1 Setting the Specimen Stand1293.2.3.2 Measuring and Setting the Specimen Height1293.2.3.3 Moving the Stage to the Specimen Exchange Position1303.2.3.4 Procedure for Loading a Specimen1313.2.4 Mounting a Specimen on the Type II Stage (5-axis motor-driven stage)1333.2.4.1 Setting the Specimen Base1333.2.4.2 Measuring and Setting the Specimen Height1343.2.4.3 Moving the Stage to the Specimen Exchange Position1363.2.4.4 Loading the Specimen1373.3 Applying the Accelerating Voltage1393.3.1 Conditions under which Accelerating Voltage can be Applied1393.3.2 Setting the Accelerating Voltage and Filament Current1393.4 Adjusting the Electron Optical System1423.4.1 Setting Parameters for the Electron Optical System1423.4.2 Axial Alignment1463.4.2.1 Items Requiring Axial Alignment1463.4.2.2 Axial Alignment Items in Detail1473.5 Operation for Image Observation1553.5.1 Selecting a Detector1553.5.1.1 Secondary Electron Detector (SE)1563.5.1.2 Backscattered Electron Detector (BSE)1573.5.1.3 Other Detectors (optional)1613.5.2 Selecting Magnification1623.5.2.1 Notes on Using the Lowest Magnification and Conducting Observations at a Low Magnification1633.5.3 Selecting Scanning Speed1663.5.4 Image Brightness and Contrast Adjustment1683.5.5 Focus and Astigmatism Correction1703.5.6 Operation of the Specimen Stage (Type I - Manual Stage)1763.5.6.1 Movable Range and Specimen Exchange Position1763.5.6.2 Restriction on the Motion of the X and Y-axes1763.5.6.3 Allowable Range of Observation and Motion of the Tilt Axis by Specimen Size1763.5.6.4 Tilt and Z Axis Limitations1783.5.6.5 Operating the Z-axis (varying the Working Distance [WD])1793.5.6.6 Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk Specimen1803.5.7 Operation of the Specimen Stage (Type II - 5-Axis Motorized Stage)1813.5.7.1 Coordinate Notation1813.5.7.2 Movable Range and Specimen Exchange Position1823.5.7.3 Setting Specimen Size and Detectors in Use1843.5.7.4 Operation Methods Used to Move the Specimen Stage1853.5.7.5 X, Y, R Axis Operation1873.5.7.6 Z and Tilt Axis Operation1903.5.7.7 Mouse Operation of Stage on the Scanning Image1913.5.7.8 Position Memory Function1993.5.7.9 Stage History Function2013.5.7.10 Image Navigation2033.5.7.11 Rotation/Tilt Eucentric Function and Calibration2073.5.7.12 Stopping Stage and Returning to Previous Stage Position2143.5.7.13 Movable Range and Limitation by Optional Detectors2143.6 Saving and Recording Images2193.6.1 Saving and Recording Images2193.6.2 Preparing Images for Recording2203.6.3 Image Capture2213.6.4 Saving a Scanning Image (Direct Save)2263.6.5 Saving Captured Images2293.6.6 Taking Photographs (Option)2303.6.6.1 Setting Photo Condition2303.6.6.2 Direct Photo Recording2323.6.6.3 Memory Photo Recording2323.6.7 Recording Data Display with Images2333.6.7.1 Image Recording Using Menu Commands or Buttons on the Control Panel2333.6.7.2 Captured Image Recording Using Buttons on the Captured Image Window2343.6.7.3 Record Captured Images without Embedding Text or Graphic Data2353.7 Using SEM Data Manager2353.8 Shutting Down2363.8.1 Turning High Voltage Off2363.8.2 Setting the Stage at the Specimen Exchange Position2363.8.3 Withdrawing the Specimen2373.8.4 Closing Windows and Shutting off the Display Power2383.8.5 Termination Confirmation Items2393.9 Other Functions2403.9.1 Screen Mode2403.9.2 Split Screen and Dual Mag Mode2433.9.3 Signal Selection and Color Mixing2443.9.4 X-ray Analysis Mode2473.9.5 Signal Processing2503.9.6 Operating Condition Memory2523.9.7 Pseudo Color Display2533.9.8 Data Entry Function2543.9.9 Raster Rotation, Dynamic Focus and Tilt Compensation2583.9.10 Printing Images Using Report Generation Function2603.9.11 Copy Image2673.9.12 Copy Image Information Text2673.9.13 Oblique Image2683.9.14 Optional Setting2693.9.15 Password Setting2743.9.16 Setting Login Name2743.9.17 Restoring DB2763.9.18 User Dependent Operation Condition Memory2773.9.19 Password Locking of Windows2783.9.20 Downloading Stage Control Program2793.10 Image Quality2813.10.1 Accelerating Voltage and Image Quality2813.10.2 Probe Current Setting and Image Quality2823.10.3 Objective Lens Movable Aperture and Image Quality2823.10.4 Influence of WD in Low-vacuum Mode2833.11 Using SEM Data Manager2843.11.1 Precaution on SEM Data Manager2843.11.2 Functions2853.11.2.1 Image Database2853.11.2.2 Menu and Tool Buttons2873.11.3 Operation2913.11.3.1 Registering Images on SEM Data Manager Database2913.11.3.2 Selecting User Name and Opening Data Tree2923.11.3.3 Image Display2933.11.3.4 Image Information2943.11.3.5 Viewer Display2943.11.3.6 Data Entry2953.11.3.7 Contrast Conversion2983.11.3.8 Image Processing3013.11.3.9 Color Mixing3033.11.3.10 Printing Images3053.11.3.11 Image File Operation3053.11.3.12 Batch Operation of Image Files3063.11.3.13 Slide Show3083.11.3.14 Optional Setting3083.11.3.15 Optimizing and Repairing Database File3104. MAINTENANCE3114.1 Maintenance of Electron Optical Column3114.1.1 Filament Exchange3114.1.2 Maintenance for the Objective Lens Movable Aperture3164.1.3 Maintenance for the Orifice Unit3204.1.4 Maintenance for the Condenser Aperture3254.1.5 Cleaning of Aperture Plates3294.1.6 Ultrasonic Cleaning with Organic Solvent3304.1.7 Replacement of Scintillator3304.2 Maintenance of Rotary Pump3314.2.1 Oil Change3314.2.2 Replacement of Oil Mist Trap Element3314.3 Maintenance of Air Compressor3324.3.1 Checkup and Maintenance3324.3.2 Troubleshooting of Air Compressor3344.3.3 Location and Functions of Major Components3354.4 Troubleshooting3364.4.1 The Evacuation System does not Run3364.4.2 The Vacuum Level in the Specimen Chamber does not Rise3374.4.3 The Emission Current Fails to Flow Normally3374.4.4 When Image is not Shown on Screen3384.4.5 When Image is Very Noisy3394.4.6 When You cannot Correct Astigmatism3404.4.7 When Auto Focus or Auto Stigma does not Work Satisfactorily3414.4.8 When S-3400N Control Program does not Start Up3414.4.9 When PC has Hung Up3424.4.10 When Error Messages are Shown3424.5 What to Do in the Event of a Power Outage or the System must be Shut Down Completely for a Long Time3434.6 What to Do when the Power Failure and the System is to be Started Up3434.7 Caution on Maintenance3444.8 Electron Gun Beam Axis Maintenance3444.8.1 Adjusting the Electron Gun Mounting Position (for service engineers)3445. REPLACEMENT PARTS3465.1 Consumables3465.2 Replacement Parts3475.3 Spare Parts3486. ACCESSORY OPERATION3496.1 Model S-5080 Auto-Camera (Option)3496.1.1 Configuration3496.1.2 Specifications3516.1.3 Assembling the Camera3536.1.4 Operation3546.2 Faraday Cup Device (Option)3566.2.1 Range of Type II Stage Drive3566.2.2 Usage Method3566.3 Specification of S-3400N External Communication (Option)3586.3.1 About the External Communication of S-3400N3586.3.1.1 Communication Procedure3586.3.1.2 Function and Limitation3586.3.2 Each Command3596.3.2.1 Initialize the Communication3646.3.2.2 Acceleration Voltage3656.3.2.3 Magnification3686.3.2.4 Working Distance (WD)3696.3.2.5 Focus Value3706.3.2.6 Probe Current3716.3.2.7 Auto Functions3726.3.2.8 Stage3746.3.2.9 Vacuum Setting3806.3.2.10 Multi-purpose Command3826.3.2.11 Machine Information3826.3.3 Programming3836.3.3.1 Example of Program3836.3.4 External Communication Setting Procedure (Setting of PC for S-3400N)3846.3.4.1 Preparation3846.3.4.2 Component Registration3846.3.4.3 Security and DCOM Settings3866.3.4.4 Setup of the External Communication Option4036.4 CD Measurement Function (Option)4046.4.1 Outline4046.4.1.1 CD Measurement Function4046.4.1.2 CD Measurement Function Options4046.4.2 Specifications4056.4.2.1 Modes of CD Measurement4056.4.2.2 Display of Measured Result4056.4.2.3 Recording/Saving of Measured Result4056.4.2.4 CD Measurement Accuracy (Reproducibility)4056.4.3 Principle of CD Measurement4066.4.3.1 Edge Detection Algorithm in Auto Measurement4066.4.3.2 Linear Approximation Method4086.4.3.3 Threshold Level Method4116.4.3.4 Measurement Accuracy and Error Factors4126.4.4 Description of Windows Used in Measuring Operation4176.4.4.1 Starting CD Measurement Function4176.4.4.2 Images for Measurement4176.4.4.3 CD Measurement Window4186.4.4.4 Measurement Condition Window4216.4.4.5 Calibration Window4286.4.5 Operation4306.4.5.1 Flow of Measuring Operation4306.4.5.2 Display of SEM Image4306.4.5.3 Start of CD Measurement Function4316.4.5.4 Setting Measurement Parameters4326.4.5.5 Calibration4346.4.5.6 Measurement Operation4396.4.5.7 Recording Measured Data449APPENDIX451INDEX462A462B462C462D463E463F463G463H463I464K464L464M464O464P464R465S465T465U465V465W466X466Size: 15.3 MBPages: 466Language: EnglishOpen manual
