Schneider Electric PM870 Manual De Usuario
© 2011 Schneider Electric. All Rights Reserved.
63230-500-225A2
PowerLogic
TM
Series 800 Power Meter
3/2011
Appendix D—Advanced Power Quality Evaluations
93
Appendix D—Advanced Power Quality Evaluations
The information in this appendix applies to the following models:
•
PM850—EN50160 (evaluation only)
•
PM870—EN50160, ITI (CBEMA), and SEMI-F47
Power Quality Standards
The Advanced Power Quality feature includes power quality (PQ) evaluations according to
the European standard EN50160 and the SEMI-F47/ITI (CBEMA) specifications. The
PM870 registers data under both standards. The PM850 can report data under the
EN50160 standard only. For instructions on how to enable these evaluation features, see
“PQ Advanced Evaluation Setup” on page 22.
the European standard EN50160 and the SEMI-F47/ITI (CBEMA) specifications. The
PM870 registers data under both standards. The PM850 can report data under the
EN50160 standard only. For instructions on how to enable these evaluation features, see
“PQ Advanced Evaluation Setup” on page 22.
SEMI-F47/ITI (CBEMA) Specification
The SEMI-F47-200 Specification for Semiconductor Processing Equipment Voltage Sag
Immunity was approved by the Global Facilities Committee and is the direct responsibility
of the North American Facilities Committee. This standard is very similar to the Information
Technical Industry (ITI) Council standard.
Immunity was approved by the Global Facilities Committee and is the direct responsibility
of the North American Facilities Committee. This standard is very similar to the Information
Technical Industry (ITI) Council standard.
Semiconductor factories require high levels of power quality due to the sensitivity of
equipment and process controls. Semiconductor processing equipment is especially
vulnerable to voltage sags.
equipment and process controls. Semiconductor processing equipment is especially
vulnerable to voltage sags.
The SEMI-F47 standard addresses specifications for semiconductor processing equipment
voltage sag immunity. It does not include over-voltage conditions, voltage sag durations
less than 0.05 seconds (50 milliseconds), or voltage sag duration greater than 1.0 seconds.
voltage sag immunity. It does not include over-voltage conditions, voltage sag durations
less than 0.05 seconds (50 milliseconds), or voltage sag duration greater than 1.0 seconds.
If necessary, the ITI CBEMA-curve can be used to specify additional requirements.
Refer to the Schneider Electric POWERLOGIC Web Pages Instruction Bulletin (document
# 63230-304-207) for more information on using the web pages on the ECC to view
SEMI-47 and ITI(CBEMA) data.
# 63230-304-207) for more information on using the web pages on the ECC to view
SEMI-47 and ITI(CBEMA) data.
Table D–1: Categorized disturbance levels (% of nominal)
Sag levels
Swell levels
80% — 90%
110% — 120%
70% — 80%
120% — 140%
40% — 70%
140% — 200%
0% — 40%
200% — 500%
Table D–2: Duration categories
Duration
< 20 msec
20 msec — 500 msec
500 msec — 10 sec
>10 sec