Hitachi Microscope & Magnifier S-4800 Manual De Usuario
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Table of Contents
(Cont’d)
3.9.11 Printing images using Report generation function .................................. 3-99
3.9.12 Copy
3.9.12 Copy
3.9.13 Copy Image information text ................................................................... 3-101
3.9.14 Oblique
3.9.14 Oblique
Image ........................................................................................ 3-102
setting....................................................................................... 3-103
3.10.1 Accelerating Voltage and Image Quality................................................. 3-107
3.10.2 Condenser Lens Setting and Image Quality ........................................... 3-108
3.10.3 Objective Lens Aperture Size and Image Quality ................................... 3-108
3.10.2 Condenser Lens Setting and Image Quality ........................................... 3-108
3.10.3 Objective Lens Aperture Size and Image Quality ................................... 3-108
3.11.1 Preparative Operation for Alignment ...................................................... 3-109
3.11.2 Mechanical Alignment of the Electron Gun............................................. 3-110
3.11.3 Alignment of the Beam Monitor Aperture................................................ 3-110
3.11.4 Alignment of the Objective Lens Aperture .............................................. 3-111
3.11.5 Mechanical Alignment of the First Condenser Lens ............................... 3-111
3.11.6 Mechanical Alignment of the Second Condenser Lens .......................... 3-111
3.11.7 Stigma Alignment (electro-magnetic alignment) ..................................... 3-112
3.11.8 Aperture Alignment (electro-magnetic alignment) .................................. 3-112
3.11.2 Mechanical Alignment of the Electron Gun............................................. 3-110
3.11.3 Alignment of the Beam Monitor Aperture................................................ 3-110
3.11.4 Alignment of the Objective Lens Aperture .............................................. 3-111
3.11.5 Mechanical Alignment of the First Condenser Lens ............................... 3-111
3.11.6 Mechanical Alignment of the Second Condenser Lens .......................... 3-111
3.11.7 Stigma Alignment (electro-magnetic alignment) ..................................... 3-112
3.11.8 Aperture Alignment (electro-magnetic alignment) .................................. 3-112
3.12.1 Precaution About SEM Data Manager.................................................... 3-114
3.12.2 Functions ................................................................................................ 3-115
3.12.3 Operation ................................................................................................ 3-119
3.12.2 Functions ................................................................................................ 3-115
3.12.3 Operation ................................................................................................ 3-119