Hitachi Microscope & Magnifier S-3400N Manual De Usuario
4.1.4
4 - 15
(7)
Replace the aperture with a new one.
(8)
After the aperture has been replaced, perform Steps (4) - (5) in reverse to re-assemble the
unit. When turning the knob clockwise and inserting the BSED detector, turn it until the
BSED detector catches the orifice unit and stops. Notice that if the knob is turned too
hard, the detector will disengage from the orifice unit and overshoot.
unit. When turning the knob clockwise and inserting the BSED detector, turn it until the
BSED detector catches the orifice unit and stops. Notice that if the knob is turned too
hard, the detector will disengage from the orifice unit and overshoot.
(9)
Press either the EVAC switch on the Evacuation Control Panel or the EVAC control button
located on the right side of the Observation Screen Control Panel, and wait until the
evacuation process finishes.
located on the right side of the Observation Screen Control Panel, and wait until the
evacuation process finishes.
EVAC Panel
Control Panel
Fig. 4.1-31 Evacuation Control Panel
4.1.4 Maintenance for the Condenser Aperture
The condenser aperture should be replaced once a year.
Directions on how to replace a condenser aperture, prepared in 3D CG, are also available.
For details, see 2.3.4, Menus.
(1)
If the accelerating voltage is ON, click OFF to shut it off.
Fig. 4.1-32 Accelerating Voltage Setup Dialog
(2)
Either press the AIR switch on the Evacuation Control Panel or press the AIR evacuation
control button located on the right side of the observation screen Control Panel. Wait until
the inside of the column reaches a complete AIR state.
control button located on the right side of the observation screen Control Panel. Wait until
the inside of the column reaches a complete AIR state.