Canon FPA-3030i5+ Stepper Guide De Spécification
Model Type
i-Line (365nm) Stepper
Wafer Size
200mm; 150mm
Resolution
≤0.35µm
Numerical Aperture (NA)
0.45 ~ 0.63
Reticle Size
6in. (0.25in. thick); optional 5in.
Reduction Ratio
5:1
Field Size
22mm x 22mm
Overlay Accuracy
≤40nm (|m|+3 )
Throughput
≥104wph (200mm)
≥120wph (150mm)
FPA-3030i5+ Stepper
Product Specifications
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Main Unit Spec