Hitachi Microscope & Magnifier S-3400N Manuel D’Utilisation

6.4    CD Measurement Function (Option) 

6 - 68 

 

 
 

Fig. 6.4-9 

Measured Dimension vs Measurement Error   
(theoretical) at Various Magnifications   

 
 

Magnification:  150 k

×

Magnification:  50 k

×

Magnification:  20 k

×

20

15 

10

5

0 

0.01

0.1

1

10 

Measurement erro

r (%) 

Measured dimension [µm]