Hitachi Microscope & Magnifier S-3400N Manuel D’Utilisation

6.4    CD Measurement Function (Option) 

6 - 72 

(8) 

Set Button   
Displays the measurement cursor.    The shape of measurement cursor varies with the type 
of measurement and measurement mode.   

 
(9) 

Measure Button   
Executes the CD measurement.   

 
(10)  Cursor Color Indication   

Specify a color for the measurement cursor.    Color changes in the order of white, red, 
green, yellow, blue, violet and light blue at each click of the button.   

 
(11)  Done/Uncalib Indication 

When the present operating condition of SEM matches the selected calibration condition, 
Done is indicated together with a calibration No.    If the conditions do not match, Uncalib 
will be indicated.     

 
(12)  Measured Data Box   

Displays the SEM conditions at measurement and the measured results.   

 
(13)  Comment Box   

Enter a comment here.    The entered comment is displayed and saved together with the 
measured result.   

 
(14)  Cancel Button  

Deletes the measured result display.    In the case of successive measurements, the final 
result will be deleted.   

 
(15)  Save Button   

Saves the measured result in a text file.    Clicking the button displays the File Save window.   

 
(16)  Calibration Combo Box 

Selects a calibration condition.    When Auto Select is selected, a calibration condition 
which matches the present operating condition will be selected automatically.     

 
(17)  Edit Button  

Opens the Calibration window for registering a calibration.   

 
(18)  Close Button   

Terminates the measurement.    The File Save window won't appear unless measured 
results are saved.   

 
(19)  Zoom Check Box 

When it is checked, a magnified image is shown in an independent window. It is useful for 
fitting cursor to measured edge in manual measurement mode.