Hitachi S-4800 Manuel D’Utilisation
4-
8
4.3 Maintenance of Air Compressor(Only for P/N 539-9010 and 539-9060)
NOTICE
Instruments shipped to Europe area where CE marking conformity is necessary do not provide
with the air compressor. Also instruments those shall be compliant to SEMI-S2 guideline do not
provide with the air compressor even when shipped to outside of Europe area.
Instruments shipped to Europe area where CE marking conformity is necessary do not provide
with the air compressor. Also instruments those shall be compliant to SEMI-S2 guideline do not
provide with the air compressor even when shipped to outside of Europe area.
4.3.1 Checkup and Maintenance
Check the following items regularly.
Before checkup/maintenance, be sure turn the main switch off.
Check the following items regularly.
Before checkup/maintenance, be sure turn the main switch off.
Service Cycle
Check Item
Procedure
Every
day
Every
250
h
(1 month)
Every
3,000
h
(1 year)
Every
6,000
h
(2 years)
Discharge of drain
Loosen the drain
cock of air tank to
discharge drain.
cock of air tank to
discharge drain.
○
Activation of control
devices (pressure
gauge, pressure switch
and safety valve)
devices (pressure
gauge, pressure switch
and safety valve)
Check the
working pressure
and activated
function.
working pressure
and activated
function.
○
Abnormal vibration and
abnormal sound
abnormal sound
○
○
Loose bolts, nuts and
screws
screws
If loose, retighten
them.
them.
○
Contamination and
clogging of strainer/filter
clogging of strainer/filter
Blow air to
remove clogged
substance.
remove clogged
substance.
○
○
○
Leakage through air
valve
valve
∗
○
●
Piston ring
∗
○
●
Rider ring
∗
○
●
Ball bearing
○
●
Bearing
∗
Needle roller
bearing
bearing
○
●
CAUTION
The air compressor should be drained gradually by slowly loosening the drain cocks.
The inside of tank is at a high pressure. So, refrain from an abrupt cock operation,
otherwise moisture may spray out to cause a danger.
The inside of tank is at a high pressure. So, refrain from an abrupt cock operation,
otherwise moisture may spray out to cause a danger.