Manuels d'utilisation pour Omega fma 1400

Table des matières

• 1. UNPACKING THE FMA 1400/1500 MASS FLOW METER

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• 1.1 Inspect Package for External Damage

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• 1.2 Unpack the Mass Flow Meter/Controller

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• 1.3 Returning Merchandise for Repair

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• 2. INSTALLATION

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• 2.1 Primary Gas Connections

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• 2.2 Electrical Connections

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• 3. PRINCIPLE OF OPERATION

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• 4. SPECIFICATIONS

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• and above 10 L/min

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• and above 10 L/min

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• 4.3 CE Compliance

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• 5. OPERATING INSTRUCTIONS

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• 5.1 Preparation and Warm Up

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• 5.2 Flow Signal Output Readings

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• 5.3 Swamping Condition

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• 5.4 Set Point Reference Signal (FMA 1400)

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• 5.5 TTL, Valve OFF Control (FMA 1400)

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• 5.6 Valve Test/Purge (FMA 1400)

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• 6. MAINTENANCE

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• 6.1 Introduction

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• 6.2 Flow Path Cleaning

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• 6.2.1 Restrictor Flow Element (RFE)

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• 6.2.2 FMA 1400/1500 Ranges up to 10 L/min

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• 6.2.3 FMA 1400/1500 Ranges above 10 L/min

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• 6.2.4 Valve Maintenance (FMA 1400)

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• 7. CALIBRATION PROCEDURES

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• 7.2 Calibration of FMA 1500 Mass Flow Meters

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• 7.2.1 Connections and Initial Warm Up

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• 7.2.2 ZERO Adjustment

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• 7.2.3 SPAN Adjustment

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• 7.3 Linearity Adjustment

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• 7.3.1 Connections and Initial Warm Up

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• 7.3.2 ZERO Adjustment

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• 7.3.3 25% Flow Adjustment

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• 7.3.4 50% Flow Adjustment

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• 7.3.5 75% Flow Adjustment

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• 7.3.6 100% Flow Adjustment

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• 7.4 Calibration of FMA 1400 Mass Flow Controllers

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• 7.4.1 Disable Solenoid Valve

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• 7.4.2 Valve Adjustment

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• 7.4.3 Full Scale Flow Adjustment

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• 7.4.4 25% Flow Adjustment

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• 7.4.5 50% Flow Adjustment

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• 7.4.6 75% Flow Adjustment

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• 7.4.7 100% Flow Adjustment

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• 8. TROUBLESHOOTING

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• 8.1 Common Conditions

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• 8.2 Troubleshooting Guide

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• 8.3 Technical Assistance

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• 9. CALIBRATION CONVERSIONS FROM REFERENCE GASES

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• APPENDIX 1 COMPONENT DIAGRAMS

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• APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS)

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• APPENDIX 3 DIMENSIONAL DRAWINGS

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• APPENDIX 4 WARRANTY

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