Hitachi Microscope & Magnifier S-4800 Manuale Utente
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3.5 Operation for Image Observation
Follow the operation below for observation of a scanning image.
3.5.1 SE detector
Follow the operation below for observation of a scanning image.
3.5.1 SE detector
S-4800 has two secondary electron detectors. the upper and the lower.
The upper secondary electron detector is placed above the objective lens and secondary
electrons are detected through the magnetic field of the lens. The lower secondary electron
detector is placed in the specimen chamber, where a large amount of the signal is due to
backscattered electrons. Signals from these two detectors can be selected individually, or mixed
together. The image contrast of these detector signals is unique in that each has its own special
characteristics.
Select upper, lower, or mix on the SIGNAL SELECT block of the Operation panel.
The upper secondary electron detector is placed above the objective lens and secondary
electrons are detected through the magnetic field of the lens. The lower secondary electron
detector is placed in the specimen chamber, where a large amount of the signal is due to
backscattered electrons. Signals from these two detectors can be selected individually, or mixed
together. The image contrast of these detector signals is unique in that each has its own special
characteristics.
Select upper, lower, or mix on the SIGNAL SELECT block of the Operation panel.
(1) Upper Detector Signal:
The signal detected with the upper detector contains secondary electrons (SE), Low angle
backscattered electrons (BSE-L) and high angle backscattered electrons (BSE-H). Using the
provided signal control function, ratio of the three sort of signals are controlled.
Note that the signal intensity of the upper detector gradually decreases as the WD becomes
longer.
backscattered electrons (BSE-L) and high angle backscattered electrons (BSE-H). Using the
provided signal control function, ratio of the three sort of signals are controlled.
Note that the signal intensity of the upper detector gradually decreases as the WD becomes
longer.
(2) Lower Detector Signal:
The lower detector signal contains secondary electrons and very low angle back scattered
electrons. Images formed with the lower detector signal show a natural surface topography
with less edge contrast. These images show a normal contrast even when a specimen is
charged. Spatial resolution is generally lower than that given by the upper detector because
backscattered electrons are generated from a wider and deeper specimen area.
electrons. Images formed with the lower detector signal show a natural surface topography
with less edge contrast. These images show a normal contrast even when a specimen is
charged. Spatial resolution is generally lower than that given by the upper detector because
backscattered electrons are generated from a wider and deeper specimen area.
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Selecting Magnification.......................................(3.1.1)
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Selecting Scanning Speed..................................(3.1.2)
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Image Brightness and Contrast Adjustment .......(3.1.3)
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Focus Adjustment and Astigmatism Correction..(3.1.3)
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Operation of Specimen Stage Type I
(Manual Stage).................(3.1.3)
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Operation of Specimen Stage Type II
(5-Axis Motorized Stage)..(3.1.3)