Manuale UtenteSommario1 Precautions for Safe Operation of the STP Pump1Usable Gases1Maintenance Precautions1Inspection Precautions1Labels12 Unpacking2Unpacking the STP Pump2Unpacking the STP Control Unit2Example of Lifting the STP Pump23 Installation of the STP pump3Name and Function of Each Part3Precautions Before Installation33.2.1 Operating Environment33.2.2 Installation Area33.2.3 Bench3How to Install the STP Pump33.3.1 Cleaning the Seal33.3.2 STP Pump Installation Positions33.3.3 How to Secure the STP Pump33.3.4 Vacuum Piping33.3.5 Connecting the Emergency Vent. Valve33.3.6 Connecting the Purge Port33.3.7 Connecting the Ground Cable3Tightening torque of bolt3Recommended securing bolt for inlet port flange3Number of Claw Clamps by Size of Flange3Configuration of the STP Pump3Installation of the STP Pump to the Vacuum Equipment3STP Pump Installation Positions3Example of securing the STP pump (When securing the inlet port with bolts)3(When securing the inlet port flange with claw clamps)3(When installing the damper in the inlet port flange)3Connecting the Purge Port and Emergency Vent. Valve34 Installation of the STP Control Unit4Name and Function of Each Part44.1.1 Front Panel44.1.2 Rear Panel44.1.3 Inside of the STP Control Unit4Precautions Before Installation44.2.1 Operating Environment44.2.2 Installation Area4Attaching the STP Control Unit Front Panel to a Rack4Cable Connection44.4.1 Name and Dimensions of Each Cable44.4.2 How to Connect the Cables4Connecting Primary Power Cable4STP Control Unit Front Panel4STP Control Unit Rear Panel4Inside of the STP Control Unit4Peripheral Space of the STP Control Unit4Example of Securing the STP Control Unit4External Dimensions of Each Cable4External Dimensions of he Power Cable4How to Secure Primary Power Cable45 How to Start/Stop the STP Pump5Before Starting5Starting/Stopping Time5Start Procedures5Stop Procedures5Manual Operation55.5.1 Powering ON55.5.2 Starting the STP Pump55.5.3 Stopping the STP Pump55.5.4 Starting the STP Pump after Stopping55.5.5 Powering OFF5Remote Operation55.6.1 Powering ON55.6.2 Starting/Stopping the STP Pump55.6.3 Starting the STP Pump After Stopping55.6.4 Powering OFF5Starting/Stopping the STP Pump During Remote Operation56 Safety Functions When an Abnormality/Error Occurs6Safety Functions66.1.1 Power Failure66.1.2 Abnormal State of Magnetic Bearing66.1.3 Excessive Vibration66.1.4 Inverter Overload66.1.5 Overheating Inside the STP pump66.1.6 Overheating Inside the STP Control Unit66.1.7 Overspeed66.1.8 Abnormal Battery Voltage66.1.9 Failure of Brake6Restarting after Any Safety Function Operates6Operation of the Emergency Vent. Valve6State of Lamps and REMOTE Output Signal at Power Failure6Operation of the STP Pump after Power Recovery6Safety Functions67 Gas Suction, Cooling and Baking the STP Pump7Gas Suction77.1.1 How to Introduce a Purge Gas7Cooling the STP Pump77.2.1 Water Cooling Method77.2.2 Air Cooling Method7Baking the STP Pump77.3.1 Attaching a Baking Heater77.3.2 Interlocking the STP Pump Operation with Baking7Attaching Positions of the Cooling Unit and Baking Heater78 Remote Input/Output Signal Terminal Blocks8I/O TB2 Terminal Block8DC I/O TB3 Terminal Block8START STOP TB5 Terminal Block8START/STOP TB6 Terminal Block8I/O TB2 Terminal Block8Rated Contacts for Relays CR1 to 4, CR7, CR8 and CR108Rated Contacts for Relays CR5 and 68DC I/O TB3 Terminal Block8START STOP TB5 Terminal Block8START/STOP TB6 Terminal Block8I/O TB2 Remote Output Signal Terminal Block8Example of Connecting I/O TB2 R. Pump Terminal8Example of Securing the Remote Cable8DC I/O TB3 Remote Input Signal Terminal Block8START STOP TB5 Remote Input Signal Terminal Block8START/STOP TB6 Remote Input Signal Terminal Block89 Internal Battery9Life of the Internal Battery9Allowable Shelf Life of the Internal Battery9How to Charge the Internal Battery9BATTERY NG Lamp9How to Replace the Internal Battery99.5.1 How to Replace the Battery Case99.5.2 How to Replace the Battery in the Battery Case9How to Dispose of the Internal Battery9Life of the Internal Battery9Allowable Shelf Life of the Internal Battery9How to Replace the Internal Battery910 External Battery10Specifications for the External Battery10Installation of the External Battery10How to Charge the External Battery10How to Dispose of the External Battery10Specifications for the External Battery1011 Operation Principle of the STP Pump11Cross Sectional View of the STP Pump1112 Maintenance and Inspection12Replacing the Internal Battery12Inspecting the Air Cooling Fan12Replacing the Fuses12Inspecting for Deposit12Overhaul12Transporting for Repair or Overhaul1213 Storage13The STP Pump13The STP Control Unit13Restarting Precautions1314 Disposal14The STP Pump14The STP Control Unit14The Battery1415 Troubleshooting15Troubleshooting Immediately After An Abnormality/Error Occurs15Abnormalities When Powering ON15Abnormalities When Performing The STP Pump Start Operation15Abnormalities While the STP Pump is Rotating15When Any Abnormality/Error Warning Lamp Lights15Troubleshooting After Powering ON15Troubleshooting When Performing The STP Pump Start Operation15Troubleshooting While the STP Pump Is Rotating15Cross Reference of Items of Abnormality Warning Lamps15Lamp Lights1516 Specifications and Accessories16Specifications for the STP Pump16Specifications for the STP Control Unit16Accessories16Recommended Spare Parts16Specifications for the STP Pump16Specifications for the STP Control Unit16Accessories16Recommended Spare Parts16(Example: STP-H1000 Series)16External Appearance of the STP Control Unit16Label Affixing Positions for the STP Pump16Label Affixing Positions for the STP Control Unit16Label Affixing Positions for the Special Accessory16Dimensioni: 2,27 MBPagine: 124Language: EnglishApri il manuale