Hitachi Microscope & Magnifier S-4800 ユーザーズマニュアル

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After selecting baking time, check items described in above (11). And then, press START 
button.  
 
In both case starting gun baking on the GUI or evacuation control panel, an error will be 
shown in the Numeric / character display and buzzer sound if something incorrect setting is 
found. 
Refer the following table if an error is generated.   

Message 
No. 

description 

recovering operation 

E31(+ 
buzzer) 

HV cable head is not placed to t 
the cable holder properly.   

Refer to above (4)   

E32(+ 
buzzer) 

Baking protection cover is not 
put.  

Check the baking cover or connector 
cover. Refer to above (9) and (10) 

E34(+ 
buzzer) 

Ion pump high voltage is not 
applied. 

IP1 to IP3 shall be ON to start baking.   

E35(+ 
buzzer) 

Ion pump 1 vacuum degraded 
while baking 

It will be generated when IP vacuum 
degraded by heating. Heater current will 
be stop and start again when vacuum 
recovered to the specified value. You 
may leave the message.   

E36(+ 
buzzer) 

Baking time setting is not correct.  Inner bake time shall be less or equal to 

(outer bake time + 2 hours). 
And outer bake time shall 2 hours or 
more. 

 
In each case, error message will be cleared by STOP switch. Baking is not started. Remove 
cause of errors and repeat time setting. And then start again. 
 
(13) After gun baking finished, wait about 6 hours for cooling.     

Remove the baking protection cover and baking heaters. Put the column cover. Refer to 
above (5) to (10) in reverse order. 
 

Electron gun/ion pump baking 

 

 

  It will take about 6 hours for cooling down to close to 

room temperature after gun baking is finished.   
Before passing the above cooling time, the electron gun 
and ion pumps are still hot.   

 
(14) Check and clean dust on the HV cable and inside the cable socket and insert the cable. 

Put the protection cover at the top of the gun.