Hitachi Microscope & Magnifier S-3400N ユーザーズマニュアル

3.5    Operation for Image Observation 

3 - 56 

3.5.6.6  Checking the Ranges of T-axis Tilting and Z-axis Motion when Observing a Bulk 

Specimen 

 
When observing a specimen that is higher than the Standard position on the height gauge or a 
bulk specimen, the interference verification protective fixture should be used when inserting the 
specimen stage so that the specimen will not touch the protective fixture, and the stage should 
be used within those ranges.   
The interference verification protective fixture has a shape similar to an objective lens and the 
backscattered electron detector combined. 
 

 

 

Fig. 3.5-26      Interference Verification Protective Fixture