Hitachi Microscope & Magnifier S-3400N ユーザーズマニュアル
6.3.2
6 - 11
6.3.2 Each Command
Table 6.3-1 Property Command
Command Return Contents
IsActive
0 : SEM not execute
1 : Ready
1 : Ready
SEM status reading
HVOn
0 : HV-OFF
1 : HV-ON
1 : HV-ON
HV ON/OFF monitoring
Vacc
0 : HV
OFF
300-30000 : 0.3-30 kV
Acceleration voltage
monitoring
monitoring
Mag 5-300000
：x5-x300k Magnification.
monitoring
WD 400-7000
：4.00-70.00 mm W.D. monitoring
ObjLensCoarse
０-16383
Focus course value
monitoring
monitoring
ObjLensFine
0-4095
Focus fine value monitoring
ProbeCurrent
0-1000 : 0.0-100.0
Probe current monitoring
ChamberType
0 : Standard specimen
chamber
chamber
Chamber type reading
StageType
0 : Manual stage
1 : 5 axis motor driven
stage
1 : 5 axis motor driven
stage
Stage type reading
VacuumMode
0 : High vacuum
1 : Low vacuum
1 : Low vacuum
Vacuum mode reading
Vacuum
6-270 : 6-270Pa
Vacuum value monitoring
InstructName
“S-3400N”
Instrument name reading
Version
0-20
Software version reading
Revision
0-99
Software revision reading