Hitachi Microscope & Magnifier S-3400N ユーザーズマニュアル
6.4.3
6 - 59
(2)
Threshold Level Method
In this method the variation of image signal at the edges is detected upon cutting off at a
desired threshold, and it is suitable when the sides of pattern edges are relatively linear.
In this method the variation of image signal at the edges is detected upon cutting off at a
desired threshold, and it is suitable when the sides of pattern edges are relatively linear.
L
Fig. 6.4-4 Threshold Level Method