ユーザーズマニュアル目次Table of Contents4Table of Contents (continued)5Table of Contents (continued)6Figures6Table of Contents (continued)7Tables7Section 1 - 9600 Compressor Description8General8Benefits8CAUTION8Compressor Configurations8System Documentation9CTI-CRYOGENICS Helium Refrigeration System9Figure 1-1: 9600 Compressor10Specifications11Dimensions1119.52 in.11(496 mm)11Figure 1-2: 9600 Compressor Dimensions11CAUTION11Weight12Table 1-1: Compressor Weight12200lbs./91kg12Electrical12Table 1-2: Electrical Input Specifications12Operating Voltage Range12180 - 253 VAC12Line Frequency1250/60 Hz12Phase12312Nominal Input Power125.5 KW12Nominal Power Factor120.8512Rated FL/LR* Current1216.2/8012Minimum Electrical Service1230 Amps12Cooling Water13Table 1-3: Cooling Water Specifications13Maximum Inlet Temperature1390 F (32 C)13Minimum Inlet Temperature1350 F (10 C)13Flow Rate132.75 ±1.25 gpm (10.4 ± 4.7 lpm)13Pressure Drop (inlet-to-outlet)13See Figure 1-313Maximum Inlet Pressure13100 psi (6.9 bars)13Alkalinity136.0 - 8.0 pH13Calcium Carbonate13< 75 ppm13Figure 1-3: Water Flow Rate versus Pressure Drop13General14Table 1-4: General Compressor Operating Specifications 14Part Numbers14Input Power Cable14(Customer Supplied)14600 VAC1410 Gauge, 3 conductor wire with ground14Must conform to local electrical codes14Nominal Helium Pressure14Refer to Table 4-114Ambient Operating Temperature Range1450 - 100º F (10 - 38º C)14Interface14Gas Supply Connector14Gas Return Connector14Remote Control Receptacle14Cryopump Power Receptacles: mates with the14CTI-CRYOGENICS supplied cryopump power cable for single pump use.14Mates with remote junction box power cable for multiple cryopump use.141/2 in. Aeroquip self-sealing coupling141/2 in. Aeroquip self-sealing coupling1424VAC, 2.7A inductive mates with P5 connector P/N MS3106A*14Adsorber Service Schedule143 Years14* Supplied by CTI-CRYOGENICS14Component Description15Control Circuit15Breaker15Figure 1-4: 9600 Compressor Rear View Component Locations15System Circuit Breaker16Control Circuit Breaker16Power ON Indicator16Gas Charge Flared Fitting16Helium Pressure Gauge16Power Inlet16Return Gas Coupling17Cooling Water IN17Cooling Water OUT17Cryopump Electrical Outlet17Table 1-5: Cryopump Electrical Outlet Pin Assignments17A and B17Heater Power - 208 VAC nominal17C17Center tap for D and E17D and E1724 VCT @ 4.6 Amps17F-G and G-H17Cold Head Voltage Output 130-160 VAC @ 4.5 Amps17J17Chassis Ground17K17Not Used17Cryopump Power Phase Switch18Compressor Remote Connector18Table 1-6: Compressor Remote Connector Pin Assignments18A and B18Compressor Remote Control - Make = ON, Break = OFF18Supply Gas Coupling18Multiple On-Board Cryopump Connections18Figure 1-5: 9600 Compressor Connected to Multiple On-Board Cryopumps19HELIUM SUPPLY19Multiple Cryo-Torr Cryopump Connections20CRYOPUMP POWER CABLE20Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps20Section 2 - Unpacking and Inspection22Introduction22Shipping Carton Inspection22Removal from Shipping Carton221. Cut the two straps on the exterior of the shipping pallet.222. Lift the cardboard carton straight up and remove it from the pallet.223. Cut the tape which holds the ramp in the vertical position.224. Swing the ramp down until the end touches the floor as shown in Figure 2-1.225. Remove any excess shipping material from around the Compressor.22WARNING22CAUTION226. Unlock the swivel casters as shown in Figure 2-1.227. Carefully roll the Compressor down the ramp and onto the floor as shown in Figure 2-1.22Figure 2-1: Using the Shipping Carton Ramp23Compressor Inspection23Compressor23Helium Static Pressure Verification23Shipping Carton Contents23Section 3 - Installation24Introduction24Figure 3-1: 9600 Compressor Installation Flowchart25Supply and Return Water Line Connections25(refer to page 3-3)25Supply and Return Water Line Connections26Hard Water Lines261. Apply a light coating of standard plumbing thread sealant to the hard line pipe threads.262. Install the Supply hard line into the INPUT connection on the rear panel of the Compressor. Ti...263. Install the Return hard line into the OUTPUT connection on the rear panel of the Compressor. T...26CAUTION264. Using a wrench, tighten the fittings.265. Allow water to flow and check for leaks at the rear of the Compressor.26Flexible Water Lines261. Apply a light coating of standard plumbing thread sealant to the barbed fitting threads.262. Install the barbed fittings into the INPUT and OUTPUT connections on the rear panel of the Com...26CAUTION263. Using a wrench, tighten the barbed fittings.264. Connect the Supply flexible water line to the INPUT barbed fitting and secure with a hose clamp.265. Connect the Return flexible water line to the OUTPUT barbed fitting and secure with a hose clamp.266. Allow water to flow and check for leaks at the rear of the Compressor.26Electrical Connections27Power Cable Preparation27WARNING27CAUTION271. Cut a 10 AWG (6.00 mm2), 3 conductor cable with ground to an appropriate length.272. Strip the cable jacket back 4 in. (101.6 mm).273. Strip the insulation back 3/8 in. (9.3 mm) on each individual conductor.274. Install a #10 ring tongue terminal on the end of each conductor using the appropriate size dou...275. Remove the rear panel as shown in Figure 3-2.276. Remove the circuit breaker terminal cover as shown in Figure 3-2.277. Install the cable into the Compressor through the cable strain relief.278. Remove the 10-32 nut and install the grounding wire on the ground stud. Install the nut and ti...279. Remove the screws from the Compressor circuit breaker terminals X, Y, and Z as shown in Figure...27Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed)2810. Install the conductor terminal lugs to the circuit breaker terminals X, Y, and Z as shown in ...2811. Torque the screws to 12 in.-lbs (0.14m-kg).2812. Allow enough cable to stay in the electrical enclosure to prevent strain on the electrical co...2813. Install the power source end of the power cable according to the local electrical codes.2814. Install the circuit breaker terminal cover.2815. Proceed with Phase Check.28Phase Check29WARNING291. Make sure power is applied to compressor circuit as described in Table 1-2.292. Turn the Compressor circuit breaker to the ON position. If the circuit breaker trips, refer to...293. If the circuit breaker trips, perform the following steps:29a. Turn the Compressor circuit breaker to the OFF position.29b. Disconnect the power cord from the power source.29c. Remove the circuit breaker terminal cover.29d. Reverse the wiring order of Compressor circuit breaker terminals X and Y.29e. Torque the circuit breaker terminal screws to 12 in.-lbs.29f. Install the circuit breaker terminal cover.29g. Repeat steps 1- 2 of this procedure.294. Install the rear panel.295. Proceed with Cryopump Power Phase Switch Setting.29Cryopump Power Phase Switch Setting301. Inspect the On-Board Cryopump(s) being installed for the presence of a THREE-PHASE label by th...302. If a three-phase label is present, set the cryopump power phase switch, shown in Figure 3-2, t...303. If a three-phase label is not present, or Cryo-Torr Cryopumps are being installed, set the cry...30Connecting/Disconnecting Helium Flex Lines30CAUTION30Connecting301. Remove all dust plugs and caps from the Gas Supply and Return lines, and the Compressor and cr...302. Connect the Gas Return line to the GAS RETURN connector on the rear of the Compressor and then...303. Connect the Gas Supply line to the GAS SUPPLY connector on the rear of the Compressor and then...304. Attach the Supply and Return line identification labels to each end of the appropriate lines.30Disconnecting311. Using two wrenches as shown in Figure 3-3, disconnect the two self sealing coupling connectors...31Figure 3-3: Connecting/Disconnecting Helium Flex Line Self Sealing Couplings31Single On-Board Cryopump Connections32CAUTION321. Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconne...322. Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear ...323. Connect the opposite end of the cold head cable to the cryopump cold head cable connector.32HELIUM SUPPLY32Figure 3-4: Single On-Board Cryopump Connections32Single Cryo-Torr Cryopump Connections33CAUTION331. Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconne...332. Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear ...33HELIUM SUPPLY33Figure 3-5: Single Cryo-Torr Cryopump Installation33Multiple On-Board Cryopump Connections34CAUTION34Helium Line Connections34CAUTION341. Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconne...342. Connect the Gas Return Line to the customer supplied helium manifold and then to the GAS RETUR...343. Connect the Gas Supply Line to the customer supplied helium manifold and then to the GAS SUPPL...34Power Cable Connections351. Connect the On-Board Splitter Box power cable between the CRYOPUMP ELECTRICAL OUTLET on the re...352. Connect the On-Board Cryopump or Waterpump power cables to the CRYOPUMP 1, 2, or 3 connectors ...35HELIUM SUPPLY35Figure 3-6: Recommended Multiple On-Board Cryopump or Waterpump Installation (Splitter Box locate...35Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation (Splitter Box locate...36HELIUM SUPPLY36Multiple Cryo-Torr Cryopump Connections36CAUTION36Helium Line Connections36CAUTION361. Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconne...372. Connect the Gas Return Line to the customer supplied helium manifold and then to the Gas Retur...373. Connect the Gas Supply Line to the customer supplied helium manifold and then to the Gas Suppl...37Power Cable Connections371. Connect the Cryo-Torr power cable between the CRYOPUMP ELECTRICAL OUTLET on the rear panel of ...372. Connect the Cryo-Torr Power Cables between the CRYOPUMP 1, 2, or 3 connectors on the Cryo-Torr...373. Connect the User Remote cable to the Cryo-Torr Interface as shown in Figures 3-8 or 3-9.374. Connect the Remote cable between the Cryo-Torr Interface and the Compressor as shown in Figure...37CRYOPUMP POWER CABLE38Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation38Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation39CRYOPUMP POWER CABLES39Section 4 - Operation40Adjusting System Helium Pressure40Static Helium System Pressure Verification401. Make sure the Compressor and Cryopump(s) are OFF.402. Make sure all system components are connected together as described in Section 3 - Installation.403. Allow all system components to acclimate to a temperature between 60º F and 80º F (15.5º C - 2...404. Read the compressor helium pressure gauge located on the compressor rear panel as shown in Fig...40Table 4-1: 9600 Compressor Helium Static Charge4060 Hz40240 - 250 psig (16.5 - 17.2 bars )4050 Hz40255 - 265 psig ( 17.6 -18.3 bars )40CAUTION415. If the static helium charge pressure is not within the ranges as indicated in Table 4-1, then ...41Compressor Operation411. Set the System Circuit Breaker to the ON (UP) position.412. Set the Control Circuit Breaker to the ON (UP) position.413. Close all Cryopump gate valves.414. Refer to the On-Board Module Programming and Operation manual or Cryo-Torr Cryopump Installati...415. Once the second stage temperature for all cryopumps is below 17K, record the compressor pressu...416. Affix a copy of the data next to the compressor gauge on each compressor. This data is to be v...41Replacement of Helium Circuit Components42CAUTION42Section 5 - Maintenance44Scheduled Maintenance44Suggested Maintenance Equipment44Table 5-1: Suggested Maintenance Equipment44Helium, 99.999% pure44-44Pressure regulator (0-3000/0-400 psi) Assy.44803140344Helium charging line terminating in a 1/4-inch female flare fitting447021002P00144Lint-free gloves and cloth44-44Oakite or equivalent detergent soap44-44Denatured alcohol44-44Adsorber Replacement451. Set the System Circuit Breaker, on the rear of the 9600 Compressor, to the OFF position.452. Remove the 4 screws which secure the rear panel to the Compressor and remove the rear panel.453. Using a 1-3/16 in. wrench, and a 1-1/8 in. wrench, as shown in Figure 5-1, disconnect the two ...45Figure 5-1: Disconnecting Self Sealing Couplings454. Using a 7/16 in. (11mm) wrench, remove the adsorber mounting bolt as shown in Figure 5-2.455. Move the adsorber from under the mounting tabs in the base as shown in Figure 5-2 and remove t...456. Install the replacement adsorber under the mounting tabs and secure it into place with the bol...457. Using two wrenches as shown in Figure 5-1, connect the two self sealing couplings quickly to m...458. Install the Compressor rear panel.459. Ensure that the pressure gauge reads the proper value as shown in Table 4-1. If additional gas...4610. Record the adsorber replacement date on the label as shown in Figure 5-2, and also note that ...46Adsorber46Mounting46Bolt46Figure 5-2: Adsorber Location within the 9600 Compressor (Rear Panel Removed)46Adjusting System Helium Pressure47Reducing Helium Pressure471. Remove the flare cap from the gas charge fitting as shown in Figure 5-3.47GAS CHARGE FLARED FITTING47Figure 5-3: 9600 Compressor Helium Pressure Control Components472. Open the gas charge control valve very slowly to allow a slight amount of helium to escape. Le...473. Close the gas charge control valve and install the flare cap.48Increasing Helium Pressure48CAUTION48CAUTION481. Attach a regulator (0-3000/0-400 psig) and charging line to a helium bottle (99.999% pure).482. Purge the regulator and charging lines as follows:49a. Open the regulator a small amount by turning the adjusting knob clockwise until it contacts th...49b. Loosely connect the charge line to the helium pressure regulator.49c. Slowly open the bottle valve, and purge the regulator and line for 10 to 15 seconds. Turn the ...493. Remove the flare cap of the gas charge flared fitting on the rear of the Compressor.494. Loosely connect the charging line from the helium pressure regulator to the 1/4-inch male flar...495. Set the helium pressure regulator to 300 psig (20.7 bars). If the compressor is ON, proceed wi...49a. Obtain the previously recorded normal system operating pressure from the Compressor Operation ...49b. Obtain the appropriate (50 or 60 Hz) static system operating pressure from Table 4-1. Open the...496. Ensure that the helium charge valve on the Compressor is tightly closed. Shut off the helium p...49Appendix A - Customer Support Information50Customer Support Center Locations50Guaranteed Up-Time Support (GUTS®)50Product Information50E-mail50Appendix B - Flow Diagram52Figure B-1: 9600 Compressor Flow Diagram52Appendix C - Troubleshooting Procedures54Troubleshooting the Compressor54The compressor troubleshooting procedures are summarized in Table C-1.54Technical Inquiries54Please refer to Appendix A of this manual for a complete list of the54CTI-CRYOGENICS’ world wide customer support centers.54WARNING54Table C-1: Compressor Troubleshooting Procedures55Appendix D - Schematic58Figure D-1: 9600 Motor Drive Compressor Schematic59サイズ： 1.16MBページ数： 59Language: Englishマニュアルを開く
