Canon Air Bearing 브로셔

AIR BEARING

Rotation Precision Exceeding Sub-Microns, High Rigidity, High Endurance
------ Canon’s Air Bearings Have Them All

Canon’s air bearings, developed originally as a key component in super-high precision manufacturing

technology, have a special structure that gives them superior characteristics such as high rigidity, high precision,

and high endurance.

The rotation precision of an air bearing is designed to be 0.05µm

maximum, much more precise than ball bearings. Another factor

that is crucial in achieving high precision is that the reproducibili-

ty be 0.01µm maximum and that this value can be maintained.

Canon’s air bearings use porous chokes in their bearings, so even

under normal factory supply-air pressure (490 kpa), they are

sufficiently rigid for common use. Compared with bearings with

orifice chokes and self-formed chokes, the rigidity per unit area is

higher, the flow consumption is about ten times (one digit)

smaller, and the damping capacity is also higher than that of

bearings with other types of chokes.

Rotational precision (15-rotation component)

Air bearing (1mm/div)

Ball bearing (1mm/div)

NRR

TIR

Air bearing with Canon motor (0.05

µm/div)

NRR=0.01

µm N=3500rpm

Motion Precision, Reproducibility Comparison

8-1