Parker Hannifin mx80l precision grade 사용자 설명서

 

14 

 

6.32 

-3.68 

2.64 

 
Published accuracy and repeatability specifications are subject to the testing methodology.  Daedal’s 
methodology provides specifications over the entire table travel regardless of start or finish position.  The 
accuracy and repeatability specifications are based on the peak to peak error measured by a laser 
interferometer and prism located at 38mm above the center of the table.  This type of measurement sums 
the X, Y, Z, roll, pitch, and yaw errors.  Temperature deviations from test condition may cause deviations 
in straightness, flatness, accuracy, and repeatability from catalog specifications.  Tests are performed with 
the table mounted to a granite table, unloaded at 20

o

 C.  

 
In this example, the accuracy of an MX80L-T02 ranges from -3.68 microns to 2.64 microns.  This table 
would have its accuracy specified as 6.32 micron since the worst case would be starting at one extreme 
and traveling to the other.

Daedal Division 
Irwin, Pennsylvania