Parker Hannifin mx80l standard grade 사용자 설명서
MX80L Series Product Manual
Chapter 2 – MX80L Series Table Specifications
Parker Hannifin Corporation
13
General Table Specifications
25mm
50mm
100mm
150mm
Normal Load Capacity
8 kg
8 kg
8 kg
8 kg
Maximum Acceleration
Precision Grade
4G
4G
4G
3G
Standard Grade
5G
5G
5G
4G
Maximum Velocity
5.0 um resolution
1100 mm/sec
1500 mm/sec
2000 mm/sec
2000 mm/sec
1.0 um resolution
1100 mm/sec
1500 mm/sec
2000 mm/sec
2000 mm/sec
0.5 um resolution
1100 mm/sec
1500 mm/sec
1500 mm/sec
1500 mm/sec
0.1 um resolution
300 mm/sec
300 mm/sec
300 mm/sec
300 mm/sec
0.02 um resolution
60 mm/sec
60 mm/sec
60 mm/sec
60 mm/sec
0.01 um resolution
30 mm/sec
30 mm/sec
30 mm/sec
30 mm/sec
Peak Force
12.0N (2.7 lbs)
12.0N (2.7 lbs)
24.0N (5.4 lbs)
24.0N (5.4 lbs)
Continuous Force
4.0N (0.9 lbs)
4.0N (0.9 lbs)
8.0N (1.8 lbs)
8.0N (1.8 lbs)
Duty Cycle
100%
100%
100%
100%
Straightness & Flatness
Precision Grade
4 microns
4 microns
5 microns
6 microns
Standard Grade
6 microns
6 microns
10 microns
12 microns
Positional Accuracy
Precision Grade (1)(2)(3)
0.01 um resolution
0.01 um resolution
3 microns
4 microns
5 microns
5 microns
0.02 um resolution
3 microns
4 microns
5 microns
5 microns
0.1 um resolution
3 microns
4 microns
5 microns
5 microns
0.5 um resolution
4 microns
5 microns
6 microns
6 microns
1.0 um resolution
5 microns
6 microns
7 microns
7 microns
5.0 um resolution
13 microns
14 microns
15 microns
15 microns
Standard Grade (2)
0.01 um resolution
0.01 um resolution
12 microns
15 microns
20 microns
20 microns
0.02 um resolution
12 microns
15 microns
20 microns
20 microns
0.1 um resolution
12 microns
15 microns
20 microns
20 microns
0.5 um resolution
12 microns
15 microns
20 microns
20 microns
1.0 um resolution
15 microns
20 microns
25 microns
25 microns
5.0 um resolution
25 microns
30 microns
35 microns
35 microns
Bi-directional Repeatability
Precision Grade (1)(2)(3)
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
Standard Grade (2)
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
Standard Grade (2)
0.01 um resolution
0.02 um resolution
0.1 um resolution
0.5 um resolution
1.0 um resolution
5.0 um resolution
Unit Mass
Precision Grade
590g
590g
1027g
1345g
Standard Grade
475g
475g
875g
1125g
Carriage Mass
Precision Grade
282g
282g
509g
676g
Standard Grade
213g
213g
405g
537g
(1) Measured at the carriage center, 35mm off mounting surface @ 20C with no load. Unit bolted to granite surface, flat to within 1 micron/300mm
(2) Total accuracy and bi-directional repeatability over full travel (peak to peak)
(3) Precision grade with slope correction value provided. Consult factory if better accuracy is required.
(2) Total accuracy and bi-directional repeatability over full travel (peak to peak)
(3) Precision grade with slope correction value provided. Consult factory if better accuracy is required.
+/- 0.8 microns
+/- 0.5 microns
+/- 1.0 microns
+/- 2.0 microns
+/- 1.0 microns
+/- 2.0 microns
+/- 10.0 microns
Travel
Specifications
+/- 0.4 microns
+/- 0.4 microns
+/- 0.4 microns
+/- 10.0 microns
+/- 0.8 microns
+/- 0.8 microns
+/- 1.5 microns
+/- 2.0 microns
+/- 0.8 microns
+/- 1.5 microns
+/- 2.0 microns
Daedal Division
Irwin, Pennsylvania
Irwin, Pennsylvania