Murata Machinery Limited Logistics & Automation Division DVM192 사용자 설명서
[USER NAME]
Approval Specifications for [TYPE NAME] (SRCC-Electrical) (29 / 35)
©Murata Machinery,LTD.Clean Systems Division/ Engineering Dept.
DOC.No.
[DOCUMENT NUMBER]
4.19 Work Command Generation Screen
This screen is used to issue normal operation commands of SRC system.
4.20 MPC Status Data Screen
This screen is used to check the status of MPC