Hitachi Microscope & Magnifier S-4800 사용자 설명서
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2.3.8.1 Column tab
The Column tab is for setting operating condition of the electron optical column.
(1) HIGH MAG MODE block
The Column tab is for setting operating condition of the electron optical column.
(1) HIGH MAG MODE block
Set column condition for High Mag mode.
(1-1) Probe current
Select Normal or High. For resolution prior
operation, use Normal. In case where larger probe
current is required, select High.
operation, use Normal. In case where larger probe
current is required, select High.
(1-2) Focus Mode
Select UHR or HR.
UHR mode is optimized for operation at short
working distance. Full working distance range
allowed for the present accelerating voltage can
be used.
HR mode is for use of rather long working
distance. Longer than about 5mm working
distance is able to be focused.
UHR mode is optimized for operation at short
working distance. Full working distance range
allowed for the present accelerating voltage can
be used.
HR mode is for use of rather long working
distance. Longer than about 5mm working
distance is able to be focused.
(1-3) Cond Lens 1
The check box On or Off excitation of the 1st
Condenser Lens.
Usually set it On (checked)
Select a excitation value with selection box. The range is 1.0 to 16.0. Higher number
results stronger excitation and then small probe current. Usual recommendation
value is 5.0.
For fine setting, use the up-down buttons.
Condenser Lens.
Usually set it On (checked)
Select a excitation value with selection box. The range is 1.0 to 16.0. Higher number
results stronger excitation and then small probe current. Usual recommendation
value is 5.0.
For fine setting, use the up-down buttons.
(1-4) Cond Lens 2
The check box On or Off excitation of the 2nd Condenser Lens.
Usually set it On (checked)
Usually set it On (checked)
(1-5) Focus Depth
Set ocus depth. Selectable range is 0.5 to 2.0. Resolution optimized condition is 1.0.
To increase focus depth, select larger number.
For usual operation, set it to 1.0 or larger to increase focus depth.
To increase focus depth, select larger number.
For usual operation, set it to 1.0 or larger to increase focus depth.
(1-6) Specimen Bias Voltage
Specimen Bias Voltage (-15V) is applied for optimum secondary electron detection.
Set it to ON for normal operation. Turn it off for some special applications such as
EBIC.
When operating the S-4800 at short working distance, you may end up with images
of uneven brightness throughout the field at low magnifications. We suggest to set
Specimen Bias Voltage at OFF in order to correct this problem.
When the specimen is tilted, however, the upper detector signal will decrease
Set it to ON for normal operation. Turn it off for some special applications such as
EBIC.
When operating the S-4800 at short working distance, you may end up with images
of uneven brightness throughout the field at low magnifications. We suggest to set
Specimen Bias Voltage at OFF in order to correct this problem.
When the specimen is tilted, however, the upper detector signal will decrease