Hitachi Microscope & Magnifier S-4800 사용자 설명서
3 - 68
3.5.7.16 Moveable range and limitation by optional detectors
(1) Movable range of the specimen stage for various specimen size
(1) Movable range of the specimen stage for various specimen size
The movable range is limited when observing large size specimens.
Stage motion is limited to inside of movable range automatically by computer. The limit value
is calculated using the size information set on the Set Sample Size/Detector dialog window
For small size specimen, X and Y limitation is specified so as the movable range covers just
the size of specimen.
For large size specimen, the movable range is limited with in safety area.
When optional detectors are inserted to its operating position, the safety area will be limited to
narrow range.
Stage motion is limited to inside of movable range automatically by computer. The limit value
is calculated using the size information set on the Set Sample Size/Detector dialog window
For small size specimen, X and Y limitation is specified so as the movable range covers just
the size of specimen.
For large size specimen, the movable range is limited with in safety area.
When optional detectors are inserted to its operating position, the safety area will be limited to
narrow range.
(2) Movable range
Fig 3-1 shows X and Y axes movable range for various specimen size.
Fig 3-2 and 3-3 show Tilt and Z axes movable range for plus and minus Tilting angle.
These are for the case where no optional detectors are in use.
Refer to operation manuals of optional detectors for limitation to the detectors.
Fig 3-2 and 3-3 show Tilt and Z axes movable range for plus and minus Tilting angle.
These are for the case where no optional detectors are in use.
Refer to operation manuals of optional detectors for limitation to the detectors.
(3) Limitation and evacuation when a optional detector is inserted
Some optional detectors have sensor switches and automatically sensed when it is inserted.
For detectors not having such sensor switches, it is necessary to set detector in use correctly
in the Set Sample Size/Detector dialog window. If a detector having sensor switch is inserted
when present stage position is out of allowable area, stage will evacuate to safe position as
follows.
For detectors not having such sensor switches, it is necessary to set detector in use correctly
in the Set Sample Size/Detector dialog window. If a detector having sensor switch is inserted
when present stage position is out of allowable area, stage will evacuate to safe position as
follows.
(3-1) EDX detector:
No limitation required
(3-2) YAG BSE detector
Allowable range of Z axis is 7mm or longer. X, Y and T axes are limited also. Refer to
instruction manual for the detector. When you insert the detectors having sensor
switches to its operation position, the stage will move automatically as follows.
instruction manual for the detector. When you insert the detectors having sensor
switches to its operation position, the stage will move automatically as follows.
(a) Turns T axis to 0.
(b) Moves Z axis to 8 mm if it is less than 7 mm.
(c) Moves X axis to 35mm (mechanical coordinate) if the present X position is out of its
(b) Moves Z axis to 8 mm if it is less than 7 mm.
(c) Moves X axis to 35mm (mechanical coordinate) if the present X position is out of its
allowable range for the specimen size and detector combination. It will happen only
when specimen size is larger than 125mm diameter.
when specimen size is larger than 125mm diameter.
(3-3) GW BSE detector
Allowable range of Z axis is 7 mm or longer. X, Y and T axes are limited also. Refer to
instruction manual for the detector.
instruction manual for the detector.