Hitachi Microscope & Magnifier S-4800 사용자 설명서

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5 - 2 
5.1.2  Replacement Parts 
 
The items below should be prepared in the necessary quantities. 
 
Table 5-2   Replacement Parts
 
 
Part No. 
Part Name 
Use 
Expiration 
J386012 
Photo multiplier R268 
Secondary electron detector 
5 years 
580-4289 
FE tip 
Electron gun 
2 years 
539-1561 
Pulse motor(X,Y) 
Type2 stage 
4 years 
539-1562 
Pulse motor(T,Z) 
Type2 stage 
4 years 
539-1563 
Mini motor R 
Type2 stage 
2 years 
539-1564 
Encoder R 
Type2 stage 
3 years 
533-0286 
Scintillator 
For lower detector 
3 years 
589-3565 
Scintillator 
For upper detector 
3 years 
− 
RP oil (SMR-100) 
For rotary pump    (1 L) 
0.5 years 
589-8652 
Oil mist trap 
RP 
0.5 years 
K433004 
Pirani gauge bulb 
Evacuation system 
3 years 
 
Rubber tube for evacuation 
Evacuation system 
5 years 
 Air 
tube 
 
Evacuation system 
3 years 
 
Vinyl hose for cooling water 
Objective lens cooling 
5 years 
 
PC monitor 
PC 
5 years 
 
Hard disk 
PC 
3 years 
 Keyboard 
PC 
years 
 Mouse 
PC 
years 
 
Battery for PC 
PC 
2 years 
K429012 
Rotary encoder 
Manual operation panel (Mag.) 
3 years 
K429013 
Rotary encoder 
Manual operation panel (others) 
5 years 
 
NOTE :  The Expiration column indicates the approximate lifetime of the part, and not the guaranteed 
period.