Canon FPA-6300ES6a Guia De Especificação
Model Type
KrF (248nm) DUV Scanner
Wafer Size
300mm
Resolution
≤ 90nm
Numerical Aperture (NA)
0.50 ~ 0.86
Reticle Size
6in. (0.25in. thick)
Reduction Ratio
4:1
Field Size
26mm x 33mm
Overlay Accuracy
≤ 5nm* (|m|+3 , Single Tool Overlay)
* Overlay Upgrade Required
Throughput
≥ 200wph** (300mm, 98shots)
** High-Throughput Upgrade Required
FPA-6300ES6a
Product Specifications
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Main Unit Spec