Canon CI-1000GA Brochura

R-1L

CI16-2

ML-08, 
ML-16

Counter

Counter

M-1

K-1

ML-08:0.2

µm, ML-16:0.4µm

IU-16

CI-200GA

CI-1000GA

CI-200GA

CI-1000GA

Counter

CI-200GA

CI-1000GA

X-1M

KP-1Z

Balance

Balance

Balance

Balance

ML-08/80,
ML-16/80

Balance

Balance

Counter

Counter

Counter

4 arc-sec

6.48 arc-sec

1 arc-sec

0.0288 arc-sec

0.00576 arc-sec

0.08 arc-sec

0.016 arc-sec

ML-08/80:0.01

µm, ML-16/80:0.02µm

ML-08:4nm, ML-16:8nm

ML-08:0.8nm, ML-16:1.6nm

R-1O

Counter

4 arc-sec

Balance

*

1

 Counter: Ordinary 4-fold counter circuit which can count the pulse edge of two phase encoder signal.

3-1