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201/203 Series 
Page 13 of 20 
This signal is amplified by the meter circuitry until is 0-5.00 VDC.  This 5 volt output is sent back to 
the power supply and to the flow meter 
circuitry, if applicable.  At the power 
supply the 5 volt output is sent to the 
terminals on the back and to the decoding 
circuitry in the display which converts it to 
a 3-digit output. 
The controller circuitry utilizes the 
Command and the Flow voltages as input 
signals.  The 0-5VDC command signal is 
subtracted from the 0-5VDC flow signal 
creating an error signal.  This signal is 
amplified and causes the solenoid valve to 
move.  The amount and direction of the 
movement is dependent upon the value and 
the sign of the error signal, and tends to 
minimize the error signal. 
3.4. Shunt: 
Measurement of flow rates higher than the 10 sccm full scale is achieved by dividing the flow with a 
fixed ratio shunting arrangement, as is illustrated in Figure 3.3.  This is accomplished by placing the 
measuring capillary tube parallel with one or more dimensionally similar channels, called a laminar 
flow element (LFE).  Therefore, the sensor only needs to heat the gas passing through the capillary 
tube resulting in low power requirements, while retaining all the mass measuring characteristics. 
 The HFC-203 uses corrugated and fused shunts similar to the shunts used in the lower flow range 
instruments.  These high range shunts are factory adjustable from 0-30 slpm to 0-500 slpm (see 
Figure 3.4), using specific corrugated shunts that give the desired flow range.  
 
 
 
 
 
 
 
 
 
 
 
 
 
 
 
FIG 3.2 
FIG 3.4 
FIG 3.3