Справочник Пользователя для Sierra Mass Flow Meter and Controller 830
Series 830/840/860 Instruction Manual
Table of Contents
IM-83/84/86-H
0-5
Electromagnetic Valves - Low and Medium Flow.............. 4-8
Electromagnetic Valves - High Flow.................................. 4-9
Motor-Operated Rotary Valves ........................................ 4-11
Valve Adjustment ............................................................ 4-12
Transducer Calibration..................................................... 4-15
Transducer Calibration..................................................... 4-15
Chapter 5 Troubleshooting
Troubleshooting Procedures..................................................... 5-1
Frequently Asked Questions .................................................... 5-4
Returning Equipment to the Factory......................................... 5-7
Frequently Asked Questions .................................................... 5-4
Returning Equipment to the Factory......................................... 5-7
Appendix A Conversion Formulas and Gas Tables
Appendix B Production Specifications
List of Figures
1-1. Flow Paths through the Transducer ................................ 1-3
1-2. Flow Measuring Principle.............................................. 1-3
1-3. Sensor Temperature Distribution ................................... 1-4
1-4. Linear Range of the Transducer’s Output Signal ............ 1-4
2-1. Piping Requirements for NPT & 1/2-inch Connections .. 2-3
2-2. Input Power Connections (20-Pin Connector) ................ 2-5
2-3. Output Signal Connections (20-Pin Connector).............. 2-5
2-4. Local Command Set Point (20-Pin Connector)............... 2-6
2-5. External Command Set Point (20-Pin Connector) .......... 2-6
2-6. 15 Volt Valve Purge and Off (20-Pin Connector)........... 2-7
2-7. 30 Volt Valve Purge and Off (20-Pin Connector)........... 2-7
2-8. Input Power (15-Pin D Connector)................................. 2-8
2-9. Output Signal (15-Pin D Connector) .............................. 2-8
2-10. Local Command Set Point (15-Pin D Connector)........... 2-9
2-11. External Command Set Point (15-Pin D Connector)....... 2-9
2-12. 15 Volt Valve Purge and Off (15-Pin D Connector) ..... 2-10
2-13. 30 Volt Valve Purge and Off (15-Pin D Connector) ..... 2-10
2-14. Motor-Operated Valve Circular 10-Pin Connector ....... 2-11
3-1. Soft Start Response Times ............................................. 3-5
4-1. Low Flow Transducer LFE Cleaning ............................. 4-2
4-2. Medium Flow Transducer LFE Cleaning ....................... 4-3
4-3. High Flow Transducer LFE Cleaning............................. 4-4
4-4. NPT Transducer LFE Cleaning...................................... 4-5
4-5. Sensor Wire Access ....................................................... 4-7
4-6. Transducer Potentiometers Used for Calibration .......... 4-12
1-2. Flow Measuring Principle.............................................. 1-3
1-3. Sensor Temperature Distribution ................................... 1-4
1-4. Linear Range of the Transducer’s Output Signal ............ 1-4
2-1. Piping Requirements for NPT & 1/2-inch Connections .. 2-3
2-2. Input Power Connections (20-Pin Connector) ................ 2-5
2-3. Output Signal Connections (20-Pin Connector).............. 2-5
2-4. Local Command Set Point (20-Pin Connector)............... 2-6
2-5. External Command Set Point (20-Pin Connector) .......... 2-6
2-6. 15 Volt Valve Purge and Off (20-Pin Connector)........... 2-7
2-7. 30 Volt Valve Purge and Off (20-Pin Connector)........... 2-7
2-8. Input Power (15-Pin D Connector)................................. 2-8
2-9. Output Signal (15-Pin D Connector) .............................. 2-8
2-10. Local Command Set Point (15-Pin D Connector)........... 2-9
2-11. External Command Set Point (15-Pin D Connector)....... 2-9
2-12. 15 Volt Valve Purge and Off (15-Pin D Connector) ..... 2-10
2-13. 30 Volt Valve Purge and Off (15-Pin D Connector) ..... 2-10
2-14. Motor-Operated Valve Circular 10-Pin Connector ....... 2-11
3-1. Soft Start Response Times ............................................. 3-5
4-1. Low Flow Transducer LFE Cleaning ............................. 4-2
4-2. Medium Flow Transducer LFE Cleaning ....................... 4-3
4-3. High Flow Transducer LFE Cleaning............................. 4-4
4-4. NPT Transducer LFE Cleaning...................................... 4-5
4-5. Sensor Wire Access ....................................................... 4-7
4-6. Transducer Potentiometers Used for Calibration .......... 4-12