Справочник Пользователя для Hitachi Microscope & Magnifier S-3400N

6.3    Specification of S-3400N External Communication (Option) 

6 - 26 

6.3.2.8  Stage 
 
(1) Stage information 
 
 Property 
 

 

Chamber type reading 

 

 

ChamberType 

as Long 

Read Only 

 

 

 

 

0: Standard specimen chamber 

 

 

 

Comment: 

Currently there is only standard specimen 
chamber, but maybe other type chamber will 
add in future. 

 
 

 

Stage type reading 

 

 

StageType 

as Long 

Read Only 

 

 

 

 

0: manual stage 

 

 

 

 

1: 5 axes motor drive stage 

 
(2)  Monitoring /setting of stage position 
 
 Method 
 

 

5 axis position monitoring 

 

 

GetStagePosition (Byref X as Long, Byref Y as Long, Byref Z as Long, 

 

 

 

Byref T as Long, Byref R as Long) as Long 

 

 

 

X   

0 to 100000000 

: (nm)   

100 nm Step 

 

 

 

Y 

0 to 50000000 

: (nm)   

100 nm Step 

 

 

 

Z 

5000000 to 70000000  : (nm) 

100000 nm Step 

 

 

 

T 

-20000 to 90000 

: x1000 (deg)  0.1 deg Step 

 

 

 

R 

0 to 359900 

: x1000 (deg)    0.1 deg Step 

 

 

 

Return 

0: Normal receiving 

 

 

 

Excluding 

0: Abnormal receiving 

 

 

 

Comment: 

Read current position of X, Y, Z, T, R.