Canon FPA-3030EX6 Stepper 规格指南
Model Type
KrF (248 nm) DUV Stepper
Wafer Size
200 mm; 150 mm; 125 mm; 100 mm
Resolution
≤ 150 nm
Reticle Size
6 in. (0.25 in. thick)
Reduction Ratio
5:1
Field Size
22 mm x 22 mm
Overlay Accuracy
≤ 25 nm (|m| + 3σ)
Options
Special Substrate Handling
Pellicle Particle Checker
PC Remote Console
Online Functions
FPA-3030EX6 Stepper
Product Specifications
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Main Unit Spec