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3.6LSM-516S 
1Specifications 
 
MODEL  
LSM-516S 
Order No. 
 
544-542 
Applicable display unit 
 
LSM-6200 
Laser scanning range 
mm(inch) 
Up to 170 (6.7
”) 
Measuring range 
mm(inch) 
1 to 160 (.04
” to 6.3”) 
Resolution  
µm(inch) 
0.1 to 100 (.000005
” to .005”) [Selectable] 
Repeatability [*1] 
µm(inch) ±1.4 
(±.000055)[*2] 
Whole range 
µm(inch) 
±7.0 (±.00028)[*3] 
µm 
±( 4.0 +2.0 
ΔD )   
Linearity  
[*1] 
Narrow measuring 
range 
inch 
±( .00016
” + .000079” 
ΔD ) 
[*3][*4] 
Positional error [*1][*5] 
µm(inch) ±8.0 
(±.0003) 
Measuring region 
mm(inch) 
40 × 160  (1.57
” × 6.3”) 
[Optical axis direction × Scanning direction] 
Number of scans for averaging 
scan 
1 to 2048 
Laser classification 
 
Class 2 (Max. Output:1.3mW with a scanning laser, semiconductor 
laser: wavelength 650nm) 
Number of laser scans 
/sec 
3200 
Laser scanning rate 
m/sec(inch/sec) 
1206 (47480
”/sec) 
Protection level 
 
IP64 
Distance between the laser 
emission unit and reception unit 
mm(inch) 
Standard 400(15.74
”) 
Max. 800 (32.72
”) [*6] 
Temperature 
°C to 40 °C 
Humidity 
35 %RH to 85 %RH [without condensation] 
Operation environment 
Altitude 
2000 m or less 
Temperature 
-15 
°C to 55 °C 
Storage environment 
Humidity 
35 %RH to 85 %RH [without condensation] 
[*1]:  Environment for accuracy validation: 20
°C
 ± 1
°C
 temperature; 50% ± 10% humidity. 
[*2]:  A value of ±2
σ with a 160mm-diameter gage has been measured for two minutes with a measurement interval of 
0.32 seconds, where 
σ is the standard deviation. 
[*3]:  The value of measurements in the center of the measurement region. 
[*4]: 
ΔD is the difference in diameter of the workpiece and the master gage. 
[*5]:  Error due to the positional shift of workpiece in optical axis direction or scanning direction. 
[*6]:  The distance between the laser emission unit and reception unit other than the standard, may affect the accuracy . 
 
2Standard accessories 
 
Part No. 
Item 
Qt. 
― 
ID uni[*7] 
02AGN770A 
Signal cable (5m / 16ft) 
99MBC094A User’s 
manual 
 
[*7]:  The ID unit stores data unique to the measuring unit. A replacement ID unit is available at extra cost.
 
 
3Optional accessories 
 
Order No. 
Item 
02AGM300 
Calibration gages set for LSM-516H 
02AGN780A/B/D 
Extension signal cables ( 5m/10m/20m)(16ft/32ft/64ft)[*8][*10][*11] 
02AGC150A/B 
Extension connecting cables(1m/3m)(3.2ft/9.6ft)[*9][*10][*11] 
[*8]  :  The signal cable can be extended up to 30 m(96ft). 
[*9]  :  The connecting cable can be extended up to 5 m(16ft). 
[*10]:  The total length of the signal cable and the intermediate cable can be extended up to 32 m(102ft). 
[*11]:  The length of the 
signal cable and the 
connecting cable other than the standard, may affect the accuracy . 
No. 99MBC094A
 
3-12