Hitachi Microscope & Magnifier S-3400N 用户手册

3.1  Starting the System 

3 - 2 

3.1  Starting the System 
 
3.1.1  Start-up Confirmation Items 
 
Before starting the system, check the following items: 
 
(1)  Check the amount and quality of oil in the rotary pump. 

 
(2)  Make sure that the rubber tubes in the evacuation system are not loose or disconnected. 
 
(3)  Close the drain cock of the compressor. 

 
(4)  Is the compressor stop valve open? 

 
(5)  Is the breaker on the customer-provided power distribution board turned on? 
 
(6)  Are all breakers on the system power distribution board turned on? 
 

 

 

Fig. 3.1-1    System Power Distribution Board 

 
 
3.1.2  Startup Operation 
 
(1)  Rotate the key switch on the EVAC Panel to START and then release it.    The system will 

start. 

 

 

 

Fig. 3.1-2    Starting the System