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3.5    Operation for Image Observation 

3 - 58 

 

 

Fig. 3.5-28    Coordinate System Area 

 
NOTICE:  The sample coordinate is not exactly the coordinate of the sample.    It is not rotated 

with the sample when it is rotated. 

 
 
3.5.7.2    Movable Range and Specimen Exchange Position 
 
(1)  Movable Range and Specimen Exchange Position 

The following table shows the movable range and the specimen exchange position. 
Mechanical coordinate and specimen coordinates are selectable for X and Y-axes.    The 
specimen coordinate is (0, 0) at the center of the specimen holder. 

 

Table 3.5-4    Operating Ranges and Specimen Exchange Position (Type II) 

 

 

Movable Range of 

Mechanical Coordinate 

Movable Range of 

Specimen Coordinate 

Exchange Position of 

Mechanical (specimen) 

Coordinate 

X 

0 ~ 100 mm 

－60 ~  ＋40 mm 

60 mm (0 mm) 

Y 

0 ~ 50 mm 

－25 ~  ＋25 mm 

25 mm (0 mm) 

R 0~360

°(Continuous rotation) 0~360° (Continuous rotation)

0° 

T 

-20 ~ 90

° 

-20 ~ 90

° 

0

° 

Z 

5.0 ~ 65 mm 

5.0 ~ 65 mm 

10 mm, 65 mm 

 

The allowable ranges of X, Y, Z and T axes are limited for a large specimen, and when 
optional detectors are in position.   
Motion of each axis is limited to within the allowable range by computer control.    There is 
no risk of striking the objective lens if the correct specimen size, height, and detectors being 
used are set correctly. 
The table below shows movable ranges along the X and Y-axes (in stage coordinates) by 
specimen size.