Hitachi Microscope & Magnifier S-3400N 用户手册

5.2  Replacement Parts 

5 - 2 

5.2  Replacement Parts 
 
The items below should be prepared in the necessary quantities. 
 

Table 5.2-1   Replacement Parts 

 

Part No. 

Part Name 

Use 

Expiration

J386042 

Photomultiplier R2649 

Secondary electron detector 

5 years 

 

TMP exchange service 

Turbo molecular pump 

3 years 

50E-1205 

Scintillator 

SE detector 

3 years 

K433004 

Pirani gauge bulb 

Evacuation system 

3 years 

52E-4501 

Rubber tube for evacuation 

Evacuation system 

5 years 

F229251 

Vinyl tube 

Evacuation system 

3 years 

51E-1528 

Rotary pump 

Evacuation system 

5 years 

 

PC monitor 

PC 

5 years 

 

Hard disk 

PC 

3 years 

 Keyboard 

PC 

3 

years 

 Mouse 

PC 

2 

years 

 

Battery for PC 

PC 

2 years 

K429012 

Rotary encoder 

Manual operation panel (Mag.) 

3 years 

K429013 

Rotary encoder 

Manual operation panel (others) 

5 years 

52E-2384 

Pulse motor X 

Type II stage 

4 years 

52E-2385 

Pulse motor Y 

Type II stage 

4 years 

52E-2386 

Pulse motor Z 

Type II stage 

4 years 

52E-2387 

Pulse motor R 

Type II stage 

4 years 

52E-2388 

Pulse motor T 

Type II stage 

4 years 

52E-4013 

Specimen stab spring 

Stage 

3 years 

 
 
NOTE:  The Expiration column indicates the approximate lifetime of the part, and not the 

guaranteed period.