Hitachi Microscope & Magnifier S-3400N 用户手册

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页码 466
2.1.2 
2 - 3 
2.1.2  Electron Optical Column 
 
Figure 2.1-2 sketches the sectional view of the S-3400N column. 
 
 
 
Fig. 2.1-2    Sectional View of S-3400N Column 
Electron Gun 
1st Condenser Lens 
2nd Condenser Lens
Objective Lens Movable Aperture
Objective Lens 
Specimen 
Chamber 
Specimen
Specimen Stab
Specimen Stage 
Beam Alignment coils
Deflection Coil 
SE Detector
BSE Detector 
Pre-centered cartridge type
Tungsten hairpin filament