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Murata Machinery Limited Logistics & Automation Division DVM192 User Manual

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[USER NAME]
Approval Specifications for [TYPE NAME]  (SRCC-Electrical)                            (19 / 35)
                                             
©Murata Machinery,LTD.Clean Systems Division/ Engineering Dept.
DOC.No.
[DOCUMENT NUMBER]
4.5  Main Monitor Screen
Main Monitor Screen is configured to be able to grasp the status of SRC and
Station.
4.6  SRC Status Screen
Detailed information in the state of SRC is displayed.