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Approval Specifications for [TYPE NAME] (SRCC-Electrical) (19 / 35)

©Murata Machinery,LTD.Clean Systems Division/ Engineering Dept.

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[DOCUMENT NUMBER]

4.5 Main Monitor Screen

Main Monitor Screen is configured to be able to grasp the status of SRC and
Station.

4.6 SRC Status Screen

Detailed information in the state of SRC is displayed.